Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Journal of Anhui University(Natural Sciences)》 2005-03
Add to Favorite Get Latest Update

Effect of annealing temperature on the microstructure and optical constants of Al film

SONG Xue-ping, WANG Pei-hong,SUN Zao-qi (School of Physics and Material Science,Anhui University,Hefei 230039,China)  
Al film, grown on Si wafer by DC sputtering,was studied with X-ray diffraction and optical phase transition and reflecting ellipsometry at different annealing temperature. The result of microstructure analysis shows that the polycrystalline Al films consist of fcc-Al grains.The mean size of Al nanoparticles increase from 22.8nm to 25.1nm with annealing temperature from 20℃ to 400℃.The lattice constant of the Al nanoparticle(4.047) was found to be slightly smaller than that of the bulk material(4.04960). The result of the optical constants of the film shows that n (λ) is affected slightly by annealing temperature, while k (λ) goes down obviously with annealing temperature from 20℃ to 400℃.
【Fund】: 国家自然科学基金资助项目(59972001);; 安徽省自然科学基金资助项目(01044901);; 安徽省教育厅科研基金资助项目(2003kj025);; 安徽省教育厅科研基金资助项目(2004kj030)
【CateGory Index】: TB43
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
【References】
Chinese Journal Full-text Database 2 Hits
1 YANG Donghua OU Xingbing ZHANG Jin (School of Material Science and Engineering,Chongqing Institute of Technology,Chongqing 400050);Research Progress in Ultrafine Grain/Nanocrystailine Al Films[J];Materials Review;2007-10
2 CHENG Bing-xun1,2,WU Wei-dong1,HE Zhi-bing1,XU Hua1,TANG Yong-jian1,LU Tie-cheng2(1.Research Center of Laser Fusion,CAEP,P.O.Box 919-987,Mianyang 621900,China;2.Department of Physics,Key Laboratory for Irradiation Physics and Technologyof Ministry of Education,Sichuan University,Chengdu 610064,China);Effects of annealing temperature on microstructure and electric properties of Al Films[J];High Power Laser and Particle Beams;2008-01
【Citations】
Chinese Journal Full-text Database 2 Hits
1 SUN Zhao-qi, CAI Qi, HE Yu-ping, SONG Xue-ping(Department of Physics, Anhui University, Hefei230039,China);A study on the optical constants of Cu bulk and Cu films[J];Journal of Anhui University(Natural Sciences);2004-02
2 He Yuping Wu Guifang Li Aixia Sun Zhaoqi Department of Physics, Anhui University, Hefei 230039 Laboratory of Internal Friction and Defects in Solids, Institute of Solid State Physics, The Chinese Academy of Sciences, Hefei 230031;Microstructure and Optical Constants of Sputtering Ag Films with Different Thicknesses[J];Acta Optica Sinica;2002-06
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 SUN Zhao-qi, CAI Qi, HE Yu-ping, SONG Xue-ping(Department of Physics, Anhui University, Hefei230039,China);A study on the optical constants of Cu bulk and Cu films[J];Journal of Anhui University(Natural Sciences);2004-02
2 WU Gui-fang, SONG Xue-ping, LIU Yong, LIN Wei, SUN Zhao-qi (Department of Physics, Anhui University, Hefei230039,China);Effects of substrate temperature on the stress properties of sputtering Cu film on Si wafer[J];Journal of Anhui University(Natural Sciences);2004-03
3 LIANG Ping,CAO Ling,SONG Xue-ping,CHENG Xiao-min,SUN Zhao-qi (School of Physics and Material Science,Anhui University,Hefei 230039,China);Microsturcture and optical properties of Ag-PET composite films[J];Journal of Anhui University(Natural Sciences);2009-02
4 LIN Wei,MA Rui-xin(School of Metallurgical and Ecological Engineering,University of Science and Technology Beijing,Beijing 100083,China);YBCO Superconducting Thin Film and its Fabrication[J];Micronanoelectronic Technology;2006-08
5 WU Chun,LIU Xiang-xuan,JIANG Da-yong,LIANG Jian-tao,WU You-peng(The Second Artillery Engineering Institute of Xi'an,Xi'an 710025,China);Preparation of Metal Cu Film and the Research of the Infrared Emissivity Properties[J];Surface Technology;2010-02
6 ;The Preparation of Functional Polycrystalline Silicon Film and the Investigation into Its Photoelectric Characteristics[J];Materials Review;1999-06
7 LI Qingshan ZHANG Jinchao SONG Li (College of Materials Science and Engineering. East China University of Technology,Shanghai 200237);Research and Applications of Nanometer-Sized ATO Transparent Conductive Anti-Static/Anti-Reflection/Anti-Radiation Films[J];Materials Review;2002-02
8 WANG Yuehui ZHUANG Zhiqiang (Department of Material Science and Engineering,South China University of Technology,Guangzhou 510640);An Analysis of Factors Influencing Preferred Oriented Ferroelectric Thin Films in Preparation[J];Materials Review;2003-04
9 HE Qiuxing Institute of Chemical Engineering and Energy,South China University of Technology,Guangzhou 510640; Department of Chemical Engineering,Shaoguan University,Shaoguan 512005 TU Weiping HU Jianqing Institute of Chemical Engineering and Energy,South China University of Technology,Guangzhou 510640;;Advances in Development of the Spectrum Selective Nanocomposite Coating[J];Materials Review;2005-12
10 XU Man, XIA Donglin, ZHAO Xiujian(Key Laboratory of Silicate Materials Science and Engineering of Ministry of Education, Wuhan University of Technology, Wuhan 430070);Progress in Transparent Conductive Oxide Films and Preparation Technology[J];Materials Review;2006-S2
China Proceedings of conference Full-text Database 5 Hits
1 CAI Xun (School of Materials Science and Engineering,Shanghai Jiaotong University,Shanghai 200240,China);Progress in research of the adjustable transparent conducting multilayers[A];[C];2007
2 SUN Fu-lai TAN Hong-lin (Engineering School of Material and Metallurgy,Kunming University of Science and Technology,Kunming 650093,China);Study of transparent and conductive ZnO:Al thin films prepared by sol-gel[A];[C];2007
3 He Ping (Liaoning Policeman College, Dalian, 116033, China);The Extension Control Technology of Nanometer Electro-thermal in Hot-working[A];[C];2005
4 Zhang Long1 Zhu Jian 1,2 Wu Jing1 Zhuo Min1 Chen Chen 1,3 1. Nanjing Electronic Devices Institute, Nanjing, 210016 2. Southeast University,Nanjing,210096 3. Nanjing University, Nanjing, 210000;Making Low-stress Metal Thin Films with Magnetron Sputtering[A];[C];2005
5 Zhang Yi~(12),Lou Junhui~2,Xiao Tian~2,Liu Hongjun~(12),Zhou Tuantuan~2 (1.School of Electronic,Information and Electrical Engineering,Shanghai Jiaotong University,Shanghai,200030,China 2.Flat Panel Display R&D Centre,SVA Electron Co.,Ltd,Shanghai,200081,China);The Burning Process of Inorganic EL Flat Panel Displays[A];[C];2009
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 WANG Ji-hui, MENG Hong-mei (School of Materials Science and Engineering, Tianjin University, Tianjin 300072, China);Microstructure and corrosion resistance of evaporated Al and Al-Mn films[J];Ordnance Material Science and Engineering;2008-04
2 Chen Xinliang,Xu Buheng,Xue Junming,Zhao Ying,Zhang Xiaodan,and Geng Xinhua(Institute of Photo-Electronics Thin Film Devices and Technique of Nankai University, Key Laboratory of Photo-Electronics Thin Film Devices and Technique of Tianjin, Key Laboratory of Opto-Electronic Information Science and Technology for Ministry of Education,Tianjin 300071,China);ZnO Thin Film Growth by Metal Organic Chemical Vapor Deposition and Its Back Contact Application in Solar Cells[J];Chinese Journal of Semiconductors;2005-12
3 Chen Xinliang,Xue Junming,Sun Jian,Zhao Ying,and Geng Xinhua(Tianjin Key Laboratory of Photo-Electronic Thin Film Devices and Technology,Key Laboratory of Opto-Electronic Information Science and Technology of the Ministry of Education, Institute of Photo-Electronic Thin Film Devices and Technology, Nankai University,Tianjin 300071,China);Growth of Textured ZnO Thin Films and Their Front Electrodes for Application in Solar Cells[J];Chinese Journal of Semiconductors;2007-07
4 MI Yan-yu, HU Nai-sai, HE Jia-wen, CHEN Hua;Evaluation of hardness measurement methods for thin films[J];China Surface Engineering;2002-03
5 LIU Heng-ping,XU Jun-qi,YAN Yi-xin(Thin Film Technology and Optical Test Open Key Laboratory,Xi'an Technological University,Xi'an 710032,China);Effect of Target Current on Structure and Characteristics of the Hydrogen-free Carbon Films by Unbalanced Magnetron Sputtering[J];Surface Technology;2009-01
6 ZHANG Youhong(Yangzhou Polytechnic College,Yangzhou 225009,China);Study on residual stress of PVC vacuum-plating aluminum film[J];Packaging Engineering;2005-05
7 YANG Dong-hua(School of Material Science and Engineering,Chongqing Institute of Technology, Chongqing 400050,China);On the Technological Parameters Deposition of Al Thin Films by DC Magnetron Sputtering[J];Journal of Chongqing Institute of Technology;2006-08
8 ZHANG Jin, SUN Zhi\|fu, YE Hong (College of Material Science and Engineering, Chongqing Institute of Technology, Chongqing 400050, China);Microstructure Analysis of Aluminum Spraying Coating on AZ91D Magnesium Alloy[J];Materials Protection;2003-06
9 LI Fu-qiu1,2, HONG Rui-jiang2, YU Zhi-ming1, DAI Ming-jiang , LIN Song-sheng2 (1.School of Materials Science and Engineering, Central South University, Changsha 410083, China;2.Guangzhou Research Institute of Nonferrous Metals, Guang-zhou 510651, China).;Microstructure and Corrosion Resistance of Ti/TiN/Zr/ZrN Multilayer Film Deposited by Cathodic Ion Plating in Vacuum[J];Materials Protection;2009-10
10 XIA Yang WANG Jihui WANG Maofan (College of Material Science and Engineering,Tianiin University,Tianjin 300072);Advances in Electroplating of Aluminum Alloy[J];Materials Review;2005-12
【Secondary References】
Chinese Journal Full-text Database 7 Hits
1 Lin Dawei1 Guo Chun1,2 Zhang Yundong1 Li Bincheng1 1 Institude of Optics and Electrics,Chinese Academy of Sciences,Chengdu,Sichuan 610209,China 2 Graduate University of Chinese Academy of Sciences,Beijing 100049,China;Preparation on Vacuum Ultraviolet Reflective Aluminum Films[J];Acta Optica Sinica;2012-02
2 ZHAO Qiaoqiao,SANG Lijun,CHEN Qiang(Beijing Key Laboratory of Printing & Packaging Materials and Technology,Beijing Institute of Graphic Communication,Beijing 102600,China);Study of Aluminum Films Deposited by Atomic Layer Deposition[J];Journal of Beijing Institute of Graphic Communication;2013-02
3 Zheng Guangfeng,Fu Jianhua,Li Yongtang,Du Shiwen,Jiang Liwen(Department of Materials Science and Engineering,Taiyuan University of Science and Technology,Taiyuan Shanxi 030024,China);Effect of Ta diffusion impervious layer on electromigration in IC Cu interconnect[J];Heat Treatment of Metals;2013-01
4 QIAO Ying-jie,FU Hong-bo,CUI Xin-fang(School of Materials Science and Chemical Engineering.Harbin Engineering University,Harbin 150001,China);Effects of heat treatment on performance of Cu films fabricated by magnetron sputtering on Al_2O_3 substrate[J];Transactions of Materials and Heat Treatment;2013-02
5 Han Anjun1,2,Zhang Jianjun1,Li Linna1,Zhang Hong1,2,Liu Caichi2,Geng Xinhua1,Zhao Ying1(1.Institute of Photo-Electronic Thin Film Devices and Technology of Nankai University,Tianjin Key Laboratory of Photo-Electronic Thin Film Devices and Technology,Key Laboratory of Opto-Electronic Information Science and Technology,Tianjin 300071,China;2.School of Material Science & Engineering,Hebei University of Technology,Tianjin 300130,China);THE INFLUENCE OF SUBSTRATE TEMPERATURE ON THE PROPERTIES OF Al BACK REFLECTOR[J];Acta Energiae Solaris Sinica;2011-05
6 Zhang Lin;Du Kai;Research Center of Laser Fusion,CAEP;;Target technologies for laser inertial confinement fusion:State-of-the-art and future perspective[J];High Power Laser and Particle Beams;2013-12
7 Zhao Qiaoqiao;Sang Lijun;Cheng Qiang;Li Xingcun;Laboratory of Plasma Physics and Materials,Beijing Institute of Graphic Communication;;Growth and Characterization of Al Films by Electron Cyclotron Resonance Plasma-Assisted Atomic Deposition[J];Chinese Journal of Vacuum Science and Technology;2013-10
【Secondary Citations】
Chinese Journal Full-text Database 3 Hits
1 He Yuping Wu Guifang Li Aixia Sun Zhaoqi Department of Physics, Anhui University, Hefei 230039 Laboratory of Internal Friction and Defects in Solids, Institute of Solid State Physics, The Chinese Academy of Sciences, Hefei 230031;Microstructure and Optical Constants of Sputtering Ag Films with Different Thicknesses[J];Acta Optica Sinica;2002-06
2 LI LI JUN WU JIN LEI (Department of Electronics,Peking University,Beijing\ 100871);PHOTOABSORPTION OF COMPLEX THIN FILMS OF NOBLE METAL PARTICLES EMBEDDED IN MATRIX (Au BaO,Cu BaO)[J];ACTA PHYSICA SINICA;1998-05
3 Sun Zhaoqi,Sun Daming,Wang Guangya,Xie Ping,Xu Zhiyuan,Li Aixia(Department of Physics,Anhui University,Hefei 230039);MICROSTRUCTURE AND OPTICAL PROPERTIES OF Cu-MgF2 CERMET FILM[J];VACUUM AND CRYOGENICS;1999-03
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved