PREPARING FILMS OF TITANIUM CARBIDE AND NITRIDE ON TITANIUM ALLOY BY LCVD
Zhang Hongjian; Fen Zhongchao; Zhang He
It is meaningful to produce films on Ti or Ti alloy in order to improve the properties of hard- ness, wear resistance, corrosion resistance, fatigue, etc. In this paper, the technologies to obtain TiN, TiC, Ti(CN) composite films on Ti and Ti - 6kl - 4V substrates have been studied. the optimizing process to ob- tain films has been found by laser - induced chemicai vapor deposition (LCVD) . The pure stoichicmetric TiN - like films were obtained by LCVD under low pressure which had homochromatic ingredients and golden col- or. The average microhardness of LCVD TiN films is HK2500 and the wear resistance is six times as much as that of substrates.
【CateGory Index】： TG174.44