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《ORDNANCE MATERIAL SCIENCE AND ENGINEERING》 2000-05
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ORTHOGONAL ANALYSIS OF CVD SiC COATING PROCESSING

Xu Zhihuai,Li Hejun  
In order to prepare reliable SiC anti-oxidation coating,the processing of preparing SiC by MTS+H 2 system was systematically researched by means of orthogonal designing method.On the basis of examining the deposition-process,the variances of effect of six technologic parameters on SiC-CVD process are calculated,and the influence level of every parameter was analyzed.The effect of twenty-one technologic parameters on deposition are also discussed.
【Fund】: 国防科学基金;; 航空科学基金
【CateGory Index】: TB33
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