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Preparation and Characteristics of ITO Films Deposited on Polyester at Low Substrate Temperature

MA Jin,ZHAO Jun qing,YE Li na,TIAN Mao hua,MA Hong lei (Institute of Optoelectronic Materials and Devices,Shandong University,Jinan 250100,China)  
ITO films have been prepared on polyester substrate by reactive evaporation technique at low substrate temperature.Structural and photoelectric properties of the deposited films are investigated.The deposited films are polycrystalline with cubic bixbyite structure.They exhibit a (111) preferred orientation.High quality films with resistivity as low as 6.63×10 -4 Ω·cm and transmittance of over 82% have been obtained.
【Fund】: 山东省自然科学基金资助项目!(970 310 3)
【CateGory Index】: TN304.21
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