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《SEMICONDUCTOR OPTOELECTRONICS》 2000-S1
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AES Analysis of Optoelectronic Materials

YIN Yan-ping, LUO Jiang cai, YANG Xiao-bo, HE Wei quan (Chongqing Optoelectronics Research Institute, Chongqing 400060, China)  
Auger electron spectroscopy (AES) is a technique for determination of composition of solid surface. Thanks to its high space-resolution, surface sensitivity and capability of obtaining composition - profile by ion sputtering etching, AES is widely used in the analysis on various materials, especially optoelectronic materials and nanometer thin film materials. This paper describes briefly the application of PH1595 multi-proble AES to analysis of optoelectronic materials.
【CateGory Index】: TN204
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