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《Semiconductor Optoelectronics》 2002-03
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Research Advances in Technology of Laser Direct Writing for Binary Optical Elements

YAN Shu hua, DAI Yi fan, LU Hai bao, LI Sheng yi (College of Mechatronics Eng. and Automation, National Univ. of Defense Technol., Changsha 410073, CHN)  
The technology of laser direct writing for binary optical elements can overcome the disadvantages caused by the traditional semiconductor technologies, such as multiprocessing steps, difficulty in controlling the accuracy of alignment, long period, and high cost, etc. It can improve the manufacturing precision and diffraction efficiency of binary optical elements. The basic principle of laser direct writing for binary optical elements is analyzed in this paper, followed by overview of available laser direct writing methods and recent progress. Finally, the future development is forecasted.
【Fund】: 国家自然科学基金资助项目 (5 0 0 0 5 0 2 2 )
【CateGory Index】: TN305.7
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