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《Semiconductor Optoelectronics》 2005-03
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Analysis on Defect Sources in Photolithographic Process

DENG Tao, LI Ping, DENG Guang-hua (Chongqing Optoelectronics Research Institute,Chongqing 400060,CHN)  
According to the fabrication process of semiconductor IC and devices,the sorts and sources of the different defect generation in photolithographic process are integrally analyzed,and the measures to reduce or eliminate these defects are proposed.
【CateGory Index】: TN405
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