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《Semiconductor Optoelectronics》 2006-06
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Analysis and Simulation for Micro-mirror of MEMS Optical Switch Based on Fractal Theory

ZHANG Yi,LUO Yuan,XU Xiao-dong(School of Automatization,Chongqing University of Posts and Telecommunications,Chongqing 400065,CHN)  
Micro-mirror is a key structure of microelectromechanica system(MEMS) optical switch.Surface roughness plays an important role in reflectivity,insertion loss,etc.The topographies of various micro-mirror surfaces have been measured by scanning tunneling microscope.These rough surfaces have been analyzed by a fractal theory,and a three-dimensional Weierstrass-Mandelbrot(W-M) function has been used to simulate the topographies of the rough surfaces.The result shows that the W-M function is efficient in creating models and analyzing the topography of MEMS surface.
【Fund】: 教育部春晖计划项目;; 重庆邮电大学博士启动基金项目(A2005-50)
【CateGory Index】: TN25
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【Co-references】
Chinese Journal Full-text Database 10 Hits
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