Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Semiconductor Optoelectronics》 2007-01
Add to Favorite Get Latest Update

Analysis of Orthogonal Experiments on ITO Films Prepared by DC Magnetron Sputtering

WANG Jun,LIN Hui,YANG Gang,JIANG Ya-dong,ZHANG You-run(School of Optoelectronic Information,University of Electronic Science and Technology of China,Chengdu 610054,CHN)  
Indium tin oxide(ITO) films were deposited by DC magnetron sputtering system and experimentations were scheduled by orthogonal test table L32(48).Sheet resistance and transmittance of films were tested.Effects of eight parameters on electrical and optical properties of the films were analyzed in detail.Three factors including deposition pressure,flow ratio of argon to oxygen and annealing temperature had greatly influence on conductance of ITO films.Best parameters about sputtering ITO were:deposition pressure 2×133.3224 mPa;Ar∶O2 16∶0.5;annealing temperature 427 ℃;gap 15;annealing time 1 h;power 300 W;annealing in vacuum;deposition temperature 227 ℃.Sheet resistance,transmittance in visible region and resistivity of the films prepared with the above parameters were 17 Ω/□,85.13%,1.87×10-4Ω·cm,respectively.
【CateGory Index】: TN204
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
【References】
Chinese Journal Full-text Database 1 Hits
1 ZHANG Bo,DONG Xian-ping,WANG Xin-jian,WU Jian-sheng(Key Laboratory for High Temperature Materials and Tests of Ministry of Education,School of Materials Science and Engineering,Shanghai Jiaotong University,Shanghai 200240,CHN);Effect of Oxygen Flow Rate on Properties of ITO and ITO∶Zr Films[J];Semiconductor Optoelectronics;2008-01
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 Sun Daoyan Sun Fuquan Wang Deming(Departmentof Forest Products and Engineering, BFU);A Study of the Force Characteristics in Wood Turning[J];Journal of Beijing Forestry University;1990-04
2 WANG Hong-ying,RAN Jun-guo,GOU Li,SU Bao-hui(School of Materials Science and Engineering,Sichuan University,Chengdu 610065,China);Preparative Process of Composite Powder for Electroless Nickel Plating onto Iron-matrix[J];Surface Technology;2006-06
3 HUANG Shi rong,\ SONG Huan lu (College of Chemical Engineering, Beijing Technology and Business University, Beijing 100037, China);STUDY ON PREPARATION OF THERMAL REACTION CHICKEN FLAVORING[J];Journal of Beijing Institute of Light Indusry;2001-03
4 DONG Ming1,SHAO Qiong-fang2(1.College of Life Science, Jiangxi Normal University, Nanchang 330027,China;2.Department of Chemistry, Jiangxi Science and Technique Teacher's College, Nanchang 330013,China);Flocculation and Filtration of Lincomycin Fermentation Broth[J];Journal of Jiangxi Normal University (Natural Sciences Edition);2002-04
5 Shen Dingan ;Sun Chengpu ;Gan Pinzhang(China Ship Scientific Research Center, Wuxi 214082);The Normal Test Research on VLCC Maneuvrability[J];JOURNAL OF SHIP MECHANICS;1999-01
6 LI Zhen-fang, JIN Zhu-nian (School of Materials and Chemical Engineering, Jinhua Profession College, Jinhua 321017, China).;Process for Nylon Coating on Piston-Type Membrane Pump[J];Materials Protection;2005-09
7 Shi Meiqi (Department of Radio Electronics, Beijing University);THE IMPEDANCE MATCHING ELEMENT OF DIELECTRIC IMAGE LINE[J];;1985-06
8 REN Shibin1,CHEN Peng 1,2(1.HUANYU Group Corporation,Wenzhou 325603,China;2.Hebei University of Technology,Tianjin 300130,China);Design and Analysis for Low Voltage Apparatus Multiple Factor Reliability Experiment[J];Low Voltage Apparatus;2009-21
9 Su Xincheng Dai Chao;The Fast Determination of Mixture Fines Contentby Supersonic Waves Cleaning Method[J];;1988-03
10 YUANG Xiang-hua;APPLICATION OF ORTHOGONAL DESIGN TO SALES DECISIONS[J];;1991-01
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 ZHONG Zhi-you,JIANG Ya-dong,WANG Tao,LI Wei-zhi, JI Xing-qiao(School of Optoelectronic Information,University of Electronic Science and Technology of China,Chengdu 610054,CHN);Improving Surface Wettability of ITO Electrode for OLED with Oxygen Plasma[J];Semiconductor Optoelectronics;2005-05
2 Song Dengyuan (Dept.of Electronics and Information Eng.Hebei Univ.Baoding 071002) Wang Xiaoping (Zhangjiakou Vocational University,zhangjiakou 075000);Advance of Optical Lithography Technology[J];SEMICONDUCTOR TECHNOLOGY;1998-02
3 ZHANG Hai xia 1,ZHANG Tai Hua 2,HUAN Yong 2 (1.Institute of Microelectronics,Peking University,Beijing100871,China; 2. State Key Lab of Nonlinear Mechanics,Institute of Mechanics,Chinese Academy of Sciences,Beijing100080,China);Nanoindentation and nanoscratch measurements on the mechanical properties of SiO_2 film[J];Micronanoelectronic Technology;2003-Z1
4 CHEN Jian,ZHANG Jiang,GAO Shan-min,QU Rong-jun (School of Chemistry and Materials Science,Ludong University,Yantai 264025,China);ITO Thin Films Prepared by the Sol-Gel Spin-Coating Method[J];Micronanoelectronic Technology;2007-03
5 He Li~,Chen Lu,Wu Jun,Wu Yan,Wang Yuanzhang,Yu Meifang,Yang Jianrong,Ding Ruijun,Hu Xiaoning,Li Yanjin,and Zhang Qinyao(Research Center for Advanced Materials and Devices,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China);MBE HgCdTe:A Challenge to the Realization of Third Generation Infrared FPAs[J];Chinese Journal of Semiconductors;2006-03
6 Zhang Deheng ( Department of Physics, Shandong University, Jinan, 250100);Shift of Optical Absorption Edgesin Transparent Conducting Films[J];;1998-03
7 WANG Shulin,XIA Donglin (The Key Laboratory of Silicate Materials Science and Engineering, Ministry of Education, China, Wuhan University of Technology, Wuhan 430070, P.R. China);Fabrication Techniques and Development of ITO Film[J];Glass & Enamel;2004-05
8 Chen Fu,Zhao En-lu,Zhang Wen-ling,Gou Jin-fang,Zeng Xiong-wei(Qinhuangdao Glass Industry Research and Design Institute,Qinhuangdao,066001);Recent Research Progress of AZO Conductive Film and Its Application[J];Glass;2007-02
9 ;The Development of Amorphous Alloy[J];Materials Review;1995-06
10 ;Semiconducting Mechanism, Aplications and Fabrication of ITO Films[J];Materials Review;1997-04
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved