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《Semiconductor Optoelectronics》 2008-05
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Measurement of Pixel Spacing in CCD Image Acquisition System Based on Double-shearing Interference

LIU Bing-qi1,SUN Dong-ping1,2,HUA Wen-shen1,LUO Xin-xin1(1.Dept.of Optical and Electronic Engineering,Ordnance Engineering College,Shijiazhuang 050003,CHN;2.Unit 75225 of PLA,Chaozhou 515728,CHN)  
To measure the pixel spacing of CCD image acquisition system precisely,a method based on double-shearing interference is presented.By measuring fringe widths in the two half-fields of the double-shearing interferometer,the pixel spacing of CCD image acquisition system can be obtained.The measurement model is built by theoretical derivation and verified by experiment.Experimental results show that this method has an accuracy of 0.04 μm.
【CateGory Index】: TP274.5
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