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《Semiconductor Optoelectronics》 2009-01
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Preparation of TiO_2 Thin Films Doped with Cu and Study on Its Structure and Optical Properties

GAO Fei,WU Zai-hua,LIU Xiao-yan(1.Hunan College of Information,Changsha 410200,CHN;2.School of Material Science and Engineering,Central South University,Changsha 410083,CHN)  
Cu-doped TiO2 thin films were prepared by DC reactive magnetron co-sputtering with two targets.The doping proportion of Cu was altered by different sputtering power.The effect of doped-Cu on the microstructure,absorption and photocatalytic properties of TiO2 thin films was studied respectively.The results show that Cu-doped TiO2 thin films have smoother surfaces,more excellent crystal quality and absorption properties.The content of the anatase phase increases and the absorption edge becomes red-shift gradually with increasing the sputtering power of Cu.When the sputtering power is more than 3 W,CuO crystal phase is formed.Doped with Cu,the photocatalytic properties of TiO2 thin films increase obviously.With increasing the sputtering power of Cu,photocatalytic properties of TiO2 thin films increase and then decrease.The sample with a Cu sputtering power of 5 W has the best photocatalytic properties.
【CateGory Index】: O484.1
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