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《SEMICONDUCTOR TECHNOLOGY》 2000-02
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Laser Holographic Lithography and Applications

Song Dengyuan (Department of Electronics and Informational Engineering,Hebei University,Baoding 071002) Wang Xiaoping (Zhangjiakou Vocational University,Zhangjiakou 075000)  
The basic principle and development of the laser holographic lithography are des cribed with emphasis on the applications in photoelectronic devices such as the manufacture of grating and field emission displays(FEDs).
【CateGory Index】: TN305.7
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【References】
Chinese Journal Full-text Database 1 Hits
1 JIANG Xue-hua(Department of Physics, Linyi Teachers′ College, Linyi Shandong 276005, China);The Development of Field Emission Research[J];Journal of Nanyang Teachers' College;2003-09
【Citations】
Chinese Journal Full-text Database 2 Hits
1 Song Dengyuan (Department of Electronics and Informational Engineering,Hebei University,Baoding 071002);Flat Panel Displays Based on Semiconductor Technology and Their Progress[J];SEMICONDUCTOR TECHNOLOGY;1998-05
2 Song Dengyuan(Department of Electronics, Hebei University);Laser-induced Aqueous Etching and Its Applications[J];Laser & Infrared;1991-05
【Co-citations】
Chinese Journal Full-text Database 2 Hits
1 Song Dengyuan Wang Yingmin Li Baotong Hao XiaoLi Mu Xinhua (Department of Electronic and Informational Engineering);Laser-Induced Aqueous Etching of Monocry stalling Silicon[J];Journal of Hebei University(Natural Science Edition);1993-03
2 LIU Wen-jun (China Huajing Electronics Group Corporation,Wuxi Jiangsu 214061,China);Flat-panel Display Technology in the 21st Century[J];Microelectronic Technology;2001-05
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 Wang Pinghong Yi Xiangyang Chongqing Optoelectronics Research Institute Yongchuan,Chongqing 632163;Submicrometer Grating for 1.55μm Wavelength DFB Semiconductor Laser[J];Semiconductor Optoelectronics;1992-02
2 Liao Meiyong (Department of Physics,Lanzhou University,Lanzhou 730000) Zhang Zhi,Liao Kejun,Wang Wanlu (Department of Applied Physics,Chongqing University,Chongqing 400044);Study on Cathode Field Emission of Diamond[J];SEMICONDUCTOR TECHNOLOGY;1999-01
3 FENG Bo-ru 1 ,ZHANG Jin 1,2 ,ZONG De-rong 1 ,JIANG Shi-lei 1 ,SU Ping 1,2 ,CHEN Bao-qin 3 ,CHEN Fen 4(1.State Key Lab of Optical Technologies for Microfabrication,Institute of Optics&Electronics,Chinese Academy of S;Study of interferometric lithography without masks[J];Semiconductor Information;2002-03
4 DU Jing-lei 1 ,SHI Rui-ying 2 ,CUI Zheng 3 ,GUO Yong-kang 1(1.Physics Department ,Sichuan University,Chengdu610064,China;2.Microelectronics R&D Center,The Chinese Academy of Scienes,Beijing100029,China;3.Rutherford Appleton Laboratory,Chilton,Didcot,Oxon OX110QX,UK);Proximity effects during mask fabrication[J];Semiconductor Information;2002-11
5 Yuan Guang;Jin Yixin;Jin Changchun; Song Hang;Zhang Baolin;Ning Yongqiang; Jiang Hong; Zhou Tianming and Li Shuwei(Changchun Institute of Physis. The Chinese Academp of Sciences, Changchun 130021)Received 7 November 1995,revised manuscript received 11 Mar;Study of Diamond Film on Silicon Tip Array[J];CHINESE JOURNAL OF SEMICONDUCTORS;1997-01
6 YE Zhi-zhen,CHEN Han-hong,LIU Rong,ZHANG Hao-xiang and ZHAO Bin-hui(National Key Laboratory of Silicon Materials,Zhejiang University,Hangzhou 3100 27,China);Structure and PL Spectrum of ZnO Films Prepared by DC Reactive Magnetron Sputtering[J];Chinese Journal of Semiconductors;2001-08
7 Xu Daxiong(Beijing University of Posts & Telecommunication, Beijing 100876);Laser Holographic 3D Image Information Processing & Transmission[J];Telecom Engineering Techniques and Standardization;2004-01
8 WENG Shou song(Huajing Group WuXi №4 Radio Component Factory, WuXi 214002, China);The Moore's Law and Semiconductor Equipment[J];Equipment For Electronic Products Manufacturing;2002-04
9 Li Xuemin ;Lu Guowei (Institute of Applied Physics, UEST of China Chengdu 610054)Zhou Lishu (Institute of Optics Electronics, Chinese Academy of Science Chengdu 610041 );A Novel Method for Refractive Microlens Array Fabrication[J];JOURNAL OF UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA;2000-03
10 TIAN Chang-hui, ZHU Chang-chun, SHI Yong-sheng, WANG Xiao-li (School of Electronics and Information Engineering, Xi' an Jiaotong University, Xi' an 710049, China);Survey on Measurement for Carbon Nanotubes-Field Emission Display[J];Journal of Electron Devices;2004-01
【Secondary References】
Chinese Journal Full-text Database 1 Hits
1 Ye Shujuan1,2 Qin Li1 Qi Xiaodong1,2 Hu Yongsheng1,2 Zhang Nan1,2 Ning Yongqiang1 Wang Lijun1 1Key Laboratory of Excited States Processes,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun,Jilin 130033,China 2Graduate University of Chinese Academy of Sciences,Beijing 100049,China;Emission Characteristics of Second-Order Distributed Feedback Semiconductor Lasers[J];Chinese Journal of Lasers;2010-09
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