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《Semiconductor Technology》 2000-06
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Making of FTO transparent conducting film by sol-gel process

JIA Xiao-lin; TAN Wei; XIN Rong-sheng; KONG Xiao-xia; (The Institute of Civil and Architectural Engineering, ZhengZhou University, ZhengZhou 450052, China)  
The experiment method on making SnO2, doping F transparent conducting film(simplified as FTO) by sol-gel process is introduced in this article. The influence of the amount of water and dopant, PH value and heat treatment conditions on the transparency to visible ligh and resistivity of the film is also discussed. The experiment shows that the hight quality FTO transparent conducting film can be obtained by the following conditions: the ratio of water to alcohol (bulk)0.25~l.5, F to Sn 0.26~l; pH value 1.5~3 and the temperature of heat treatment 400~600℃. It also shows that methylamide can restrain the hydrolysis of alcohol salt, increase the rate of condensation polymerization and keep the film from dry crack.
【Fund】: 河南省科学技术攻关资助项目
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