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《Semiconductor Technology》 2003-01
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Development and applications of MEMS technology

ZHU Jian1,2(1.Dept. of Instrument Science and Engineering , Southeast University2.No. 55 Institute of China Electronics Technology Group Corporation, Nanjing 210016,China)  
An overview of MEMS technology is presented on background, types, applicationsand developing trend.
【CateGory Index】: TH703
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【References】
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