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《Semiconductor Technology》 2003-06
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Layout in semiconductor manufacturing plant

YU Jing, QIAN Xing-san, SHAO Zhi-fang(The research Center of Microelectronics Development of USST. Shanghai 200093,China)  
In semiconductor factory, the layout can not be changed randomly because of thecostliness and sensitivity of equipments and the complexity of processes. The layout designedinconsiderately will cause expensive cost of material handling, inefficient manufacture of produc-tions and a great deal of cost which relayout is required. Therefore, the layout has been the questionthat semiconductor manufacturers care most. This paper makes a systematic exposition of the latestlayout configuration of semiconductor manufacturing plant by the rules of layout in manufacturing.
【CateGory Index】: TN305
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