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《Semiconductor Technology》 2005-01
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Several New Ion Etching Technologies of Fabricating Deep Submicron/Nanometer CMOS Devices

CHENG Li, WANG Zhen-yu, WU Xiao-hong, FAN Mu-hong, ZHU Jun, ZHAO Qian (Institute of Electricity & Information, Jiangsu University, Zhenjiang 212013, China)  
Ion etching technologies for fabricating deep submicron /nanometer CMOS devices, which including Kaufman ion milling etching, the fluorine-based gas polycrystalline silicon etching, the chlorine-based or bromine-based gas silicon deep-etching, the electron cyclotron resonance etching system and the inductively coupled plasma etcher are summarized, also the strong and weak points and the main application points of these new ion etching technologies are analysed and compared in more details.
【Fund】: 江苏省高校自然科学研究基金项目(02KJB510005)
【CateGory Index】: TN305
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【Citations】
Chinese Journal Full-text Database 5 Hits
1 CHENG Li, LI Yan-xu, LI Chun-ming, LIU Bin, WANG Yang (1. Institute of Electricity & Information, Jiangsu University of Science & Technology, Zhenjiang 212013, China; 2. Department of Computer & Science, Nantong institute of Technology, Nantong 226001, Ch;A summary of LSI DAC developing technology[J];Semiconductor Technology;2001-06
2 CHENG Li, WANG Zhen-yu, GAO Ping(Institute of Electricity & Information, Jiangsu University, Zhenjiang 212013, China);Latest progresses and developments of DRAM fabrication[J];Semiconductor Technology;2004-04
3 CHENG Li, WANG Zhen-yu, GAO Ping, ZHU Jun(Institute of Electricity & Information, Jiangsu University, Zhenjiang 212013, China);The technologies and applications of DFT for VLSI[J];Semiconductor Technology;2004-05
4 CHENG Li1, LI Chun-ming2,WANG Zhen-yu1, GAO Ping1(Institute of Electricity & Information, Jiangsu University, Zhenjiang 212013, China);The measures of new technology & development in IC industrial chain[J];Semiconductor Technology;2004-06
5 CHENG Li1, LI Chun-ming2, WANG Zhen-yu1, ZHU Jun1(1. Institute of Electricity & Information, Jiangsu University, Zhenjiang 212013, China;2. Department of Computer, Nantong Institute of Technology, Nantong 226001, China);Several New Ion Beam Doping Technologies of Ultra-Shallow Junction for Nanometer CMOS Fabrication[J];Semiconductor Technology;2004-09
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 CHENG Li, WANG Zhen-yu, GAO Ping(Institute of Electricity & Information, Jiangsu University, Zhenjiang 212013, China);Latest progresses and developments of DRAM fabrication[J];Semiconductor Technology;2004-04
2 CHENG Li, WANG Zhen-yu, GAO Ping, ZHU Jun(Institute of Electricity & Information, Jiangsu University, Zhenjiang 212013, China);The technologies and applications of DFT for VLSI[J];Semiconductor Technology;2004-05
3 CHENG Li1, LI Chun-ming2,WANG Zhen-yu1, GAO Ping1(Institute of Electricity & Information, Jiangsu University, Zhenjiang 212013, China);The measures of new technology & development in IC industrial chain[J];Semiconductor Technology;2004-06
4 CHENG Li1, LI Chun-ming2, WANG Zhen-yu1, ZHU Jun1(1. Institute of Electricity & Information, Jiangsu University, Zhenjiang 212013, China;2. Department of Computer, Nantong Institute of Technology, Nantong 226001, China);Several New Ion Beam Doping Technologies of Ultra-Shallow Junction for Nanometer CMOS Fabrication[J];Semiconductor Technology;2004-09
5 CHENG Li, WANG Zhen-yu, JING Liang(Institute of Electricity & Information, Jiangsu University, Zhenjiang 212013, China);Design of SOC:A Great Revolution of Design & Technology in IC Chain[J];Semiconductor Technology;2004-12
6 CHENG Li, WANG Zhen-yu, ZHU Jun, ZHAO Qian, SHI Shou-yong, ZHU Yi-yun (Institute of Electricity & Information, Jiangsu University, Zhenjiang 212013, China);Summary of WL-CSP technologies & their applications[J];Semiconductor Technology;2005-02
7 FAN Mu-hong, CHENG Li, LIU He-xiang (Institute of Electricity & Information, Jiangsu University, Zhenjiang 212013, China);All-Digital DFT Testing Analysis for Charge Pump Phase-Locked Loop[J];Semiconductor Technology;2005-04
8 CHENG Li, ZHAO Qian, WANG Zhen-yu, ZHU Jun, FAN Mu-hong, LIU He-xiang (Institute of Electricity & Information, Jiangsu University, Zhenjiang 212013, China);Technology & Applications of Scattering with Angular Limitation in Projection Electron-Beam Lithography[J];Semiconductor Technology;2005-06
9 WANG Zhen-yua, CHENG Lib, ZHU Junb (a. Institute of Applied Science and Technology, b. Institute of Electricity & Information, Jiangsu University, Zhenjiang 212013, China);Manufacturing Technologies for MEMS at Micro/Nanometer Level[J];Semiconductor Technology;2005-08
10 CHENG Li, WANG Zhen-yu, ZHU Yi-yun, LIU He-xiang(Institute of Electricity & Information, Jiangsu University, Zhenjiang 212013, China);Extremely Ultraviolet Lithography Fabrication Technology for Nanometer ULSI Devices[J];Semiconductor Technology;2005-09
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1 Ma Chunyu and Zhang Qingyu State Kay Laboratory of Materials Modification by Laser, Ion and Electron Beams,Dalian University of Technology, Dalian, 116024, China;Deposition Temperature and Surface Microstructures ZrO_2[A];[C];2006
【Co-references】
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1 CHENG Li1, LI Yan-xu1, DONG Su-ling2, WANG Yan1, TANG Ping1(1.Institute of Electricity & Information, Jiangsu University, Zhenjiang, 212013, China;2.Department of Machinery & Electricity, Xuzhou Institute of Architectural Technology, Xuzhou, 221008, China;Design, fabrication and application of BiCMOS tristate logic gates[J];Semiconductor Technology;2002-08
2 ZHONG Guo-hua,WU Yu-guang(Institute of Microelectronics, Xidian University, Xi’an 710071, China);Analysis of a PWM chip and the simply design of its oscillator circuit[J];Semiconductor Technology;2004-02
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【Secondary Citations】
Chinese Journal Full-text Database 10 Hits
1 CHENG Li, LI Yan-xu, LI Chun-ming, LIU Bin, WANG Yang (1. Institute of Electricity & Information, Jiangsu University of Science & Technology, Zhenjiang 212013, China; 2. Department of Computer & Science, Nantong institute of Technology, Nantong 226001, Ch;A summary of LSI DAC developing technology[J];Semiconductor Technology;2001-06
2 CHENG Li1, LI Yan-xu1, DONG Su-ling2, WANG Yan1, TANG Ping1(1.Institute of Electricity & Information, Jiangsu University, Zhenjiang, 212013, China;2.Department of Machinery & Electricity, Xuzhou Institute of Architectural Technology, Xuzhou, 221008, China;Design, fabrication and application of BiCMOS tristate logic gates[J];Semiconductor Technology;2002-08
3 DONG Su-ling ,CHENG Li, WANG Zhen-yu, GAO Ping(Institute of Electricity & Information, Jiangsu University, Zhenjiang, 212013, China);Designed 65-kb BiCMOS SRAM using 0.8μm process technology[J];Semiconductor Technology;2003-06
4 YE Ming-jun,YAN Xue-long,LEI jia,GUO Xue-ren(CAT Lab. Guilin University of Electronic Technology,Guilin 541004,China);Application of pseudorandom testing in mixed-signal circuits parameter test[J];Semiconductor Technology;2003-09
5 GAO Ping, CHENG Li, WANG Zhen-yu, ZHU Jun, SHI Yi-qiao(Institute of Electricity & Information Engineering, Jiangsu University, Zhenjiang 212013,China);A built-in self-test technology of digital VLSI circuits[J];Semiconductor Technology;2003-09
6 LI Ren(The 45th Research Institute,CETC,Beijing 101601,China);Semi-conductor IC cleaning technology[J];Semiconductor Technology;2003-09
7 WANG Zhen-yu, CHENG Li, GAO Ping, SHI Yi-qiao, ZHU Jun(Institute of Electricity & Information Engineering, Jiangsu University, Zhenjiang 212013,China);CSP technology and its development foreground[J];Semiconductor Technology;2003-12
8 CHENG Li, WANG Zhen-yu, GAO Ping(Institute of Electricity & Information, Jiangsu University, Zhenjiang 212013, China);Latest progresses and developments of DRAM fabrication[J];Semiconductor Technology;2004-04
9 CHENG Li, WANG Zhen-yu, GAO Ping, ZHU Jun(Institute of Electricity & Information, Jiangsu University, Zhenjiang 212013, China);The technologies and applications of DFT for VLSI[J];Semiconductor Technology;2004-05
10 CHENG Li1, LI Chun-ming2,WANG Zhen-yu1, GAO Ping1(Institute of Electricity & Information, Jiangsu University, Zhenjiang 212013, China);The measures of new technology & development in IC industrial chain[J];Semiconductor Technology;2004-06
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