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《Semiconductor Technology》 2005-03
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Studies of the Characteristic of Ultrasonic Complex Transverse Vibration Energy Transmission in Wire Bonding

CHEN Xin1,2,LI Jun-hui1,TAN Jian-ping1 (1.Packaging and Printing College of Zhuzhou Institute of Technology, Zhuzhou, 412008,China;2. Mechanical-Electric Engineering College of Central South University, Changsha, 410018, China)  
At present, wire bonding uses mainly thermosonic technology. Ultrasonic vibration propagation and energy transmission are a very important and complex problem in wire bonding equipment. The transmitting model of ultrasonic vibration in ultrasonic transducer and capillary is given in this paper by utilizing the propagating mechanism of ultrasonic wave in elastic body. The ultrasonic vibration displacement and velocity of high frequency are measured with the laser doppler vibration PSV-300-F(1.5MHz),then the conclusion in theory is proven. Welding characteristics of welding tool with ultrasonic longitudinal–complex transverse vibration system are studied. It shows that longitudinal–complex transverse vibration system is a model of high-efficient energy transmission.
【Fund】: 湖南省自然科学基金项目(04JJ40036);; 湖南省教育厅科研项目(03C590)。
【CateGory Index】: TN405
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