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《Semiconductor Technology》 2005-05
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Preparation of Nano-Scale SrTiO_3 Thin Films By Sol-Gel Process

LIU Chao, LI Jian-ping, ZENG Yi-ping(The Materials Center, Institute of Semiconductors,Chinese Academy of Sciences, Beijing 100083, China)  
The SrTiO3 polycrystalline nanofilms with perovskite-type structure were prepareddirectly on Si(100) substrate by the sol-gel process. The precursor solution took strontium acetateand titanium tetrabutoxide (Ti(OC4H9)4)as starting materials, acetylacetone as chelator, 2-methoxyethanol as solvent, acetic acid as subsidiary solvent catalyzer, and the wet film wasspin-coated on Si substrate. XRD, AFM, SEM and spectroscopic ellipsometry (SE) were used toinvestigate the properties of SrTiO3 nanofilms. The homogeneous, smooth and crack-free surface ofSrTiO3 nanofilms with thickness of 20~30 nm, refractive index of 1.75~1.85, grain size of 35~60 nm,RMS of 3.4~3.8 nm and cone-like grain shape were obtained.
【Fund】: 国家自然科学基金资助项目(60276045)
【CateGory Index】: TN304
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1 LIU Xian-Ming YAO Hai-Jun ZHANG Xiao-Gang * XIA Xi (Institute of Applied Chemistry,Xin jiang University,Urumqi830046);Synthesis of Nanophase CoTiO_3 and its Influence on MnO_2 Electrode[J];Chinese Journal of Inorganic Chemistry;2003-03
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