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《Semiconductor Technology》 2005-05
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Preparation of Nano-Scale SrTiO_3 Thin Films By Sol-Gel Process

LIU Chao, LI Jian-ping, ZENG Yi-ping(The Materials Center, Institute of Semiconductors,Chinese Academy of Sciences, Beijing 100083, China)  
The SrTiO3 polycrystalline nanofilms with perovskite-type structure were prepareddirectly on Si(100) substrate by the sol-gel process. The precursor solution took strontium acetateand titanium tetrabutoxide (Ti(OC4H9)4)as starting materials, acetylacetone as chelator, 2-methoxyethanol as solvent, acetic acid as subsidiary solvent catalyzer, and the wet film wasspin-coated on Si substrate. XRD, AFM, SEM and spectroscopic ellipsometry (SE) were used toinvestigate the properties of SrTiO3 nanofilms. The homogeneous, smooth and crack-free surface ofSrTiO3 nanofilms with thickness of 20~30 nm, refractive index of 1.75~1.85, grain size of 35~60 nm,RMS of 3.4~3.8 nm and cone-like grain shape were obtained.
【Fund】: 国家自然科学基金资助项目(60276045)
【CateGory Index】: TN304
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Chinese Journal Full-text Database 1 Hits
1 GUO Chun-wei;MA Ying;YAN Shao-an;ZHOU Yi-chun;School of Materials Science and Engineering,Xiangtan University;Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education,Xiangtan University;;Electrical Properties of Pt/Bi_(3.15)Nd_(0.85)Ti_3O_(12)/SrTiO_3/Si Capacitor Structure Fabricated by Sol-Gel Method[J];Modern Applied Physics;2014-04
Chinese Journal Full-text Database 1 Hits
1 Chen Zhenliang; Yang Jinxian(Qinghai Institute of Salt Lakes, Academia Sinica, Xining 810008);Review of Study on SrTiO_3, and SrTiO_3,-based Nanocrystalline Functional Materials[J];JOURNAL OF SALT LAKE RESEARCH;1999-02
Chinese Journal Full-text Database 3 Hits
1 LIU Xian-Ming YAO Hai-Jun ZHANG Xiao-Gang * XIA Xi (Institute of Applied Chemistry,Xin jiang University,Urumqi830046);Synthesis of Nanophase CoTiO_3 and its Influence on MnO_2 Electrode[J];Chinese Journal of Inorganic Chemistry;2003-03
2 Liu Ting Tan Song-Lin Zhang Hui Qin Yi Zhang Peng-Xiang(Institute of Advanced Materials for Photo-electrics,Kunming University of Science and Technology,Kunming 650051,China);Oxygen pressure effect on lattice parameters of SrTiO_3 and SrNb_(0.2)Ti_(0.8)O_3 thin films and laser-induced thermoelectric voltages effect[J];Acta Physica Sinica;2008-07
3 NING Ji1,WANG Ning-zhang1,GAO Ya1,LI Jian-ye2(1.College of Computer and Electronic Information,Guangxi University,Nanning 530004,China; 2.College of Material science,Guangxi University,Nanning 530004,China);Influence of Ca~(2+) doping on SrTiO_3 varistor ceramic dielectric loss[J];Modern Electronics Technique;2013-12
Chinese Journal Full-text Database 10 Hits
1 BI Xiao-guo~(1,2),HUANG Fei~1, HE Feng-ming~1, ZHAO Hong-sheng~3 ,SUN Xu-dong~1 (1. School of Materials and Metallurgy, Northeastern University,Shenyang 110004,China; 2.Shenyang Engineering College, Shenyang 110036, China; 3.Liaoning Xiang-ou Crystal Materials Co.Ltd., Shenyang 110179, China) (Received 3 September 2004);Runover during the Growth of SrTiO_3 Grystal[J];Journal of Synthetic Crystals;2005-02
2 LIU Jian1,2,MIAO Hong-yan1,TAN Guo-qiang1,HE Zhong-liang1,XIA Ao1(1.School of Materials Science and Engineering,Shaanxi University of Science and Technology,Xi'an 710021,China;2.Department of Environmental and Chemical Engineering,Tangshan College,Tangshan 064003,China);Preparation and Characterization of SrTiO_3 Functional Ceramic Thin Film by Self-assembled Monolayers Technique[J];Journal of Synthetic Crystals;2009-S1
3 YANG Chen-xing,LIU Ting-yu,CHENG Zhi-jun,GAN Hai-xiu(College of Science,University of Shanghai for Science and Technology,Shanghai 200093,China) (Received 9 October 2011,accepted 30 November 2011);Study on the Electronic Structure of SrTiO_3 with Oxygen Vacancy[J];Journal of Synthetic Crystals;2012-01
4 KANG Ming~(1,2),XIE Ke-nan~(1),LU Zhong-yuan~(1,2),TENG Yuan-cheng~(2),DAI Ya-tang~(1,2),SUN Rong~(2),XIONG Xiao-li~(2),XU Pi-chi~(2)(1.School of Chem. Eng., Sichuan Univ., Chenilding Materials of Sichuan Province,Sichuan Mianyang 621002,China);Preparation of Nanometer Material ZnO:Eu,Li with Red Fluorescence by the Sol-Gel Method[J];Journal of Sichuan University (Engineering Science Edition);2005-01
5 BI Jian,LAI Xin,ZHANG Shu,GAO Dao-jiang (College of Chemistry, Sichuan Normal University, Chengdu 610066, Sichuan);Preparationi of Strontium Titanate Functional Ceramic Thin Film by Hydrothermal Method[J];Journal of Sichuan Normal University(Natural Science);2004-04
6 YANG Li1,ZHAO Li2,LIN Xiao3 (1.School of Management Engineering,Shandong Jianzhu University,Jinan 250101, China;2.Business School,Shandong Jianzhu University,Jinan 250101,China;3. Assets Department,Shandong Jianzhu University,Jinan 250101,China);Application of chelator in strontium titanate as lean-burning oxygen sensors[J];Journal of Shandong Jianzhu University;2007-01
7 MENG Qing-chao,GE Sheng-song,SHAO Qian(School of Chemistry and Environment Engineering,Shandong University of Science and Technology,Qingdao 266510,China);Advances in application of preparation of nano-thin films by sol-gel method[J];Shandong Science;2006-04
8 YU Hui 1 ,ZHAI Qing-zhou 1 ,CAI Jian-yan 1,2 (1.Research Center for Nanotechnology, Changchun University of Science and Technology, Changchun,Jilin130022, China; 2.College of Vocational Technology,Changchun University,Changchun,Jilin130022,China);Development and Application of Nanosized Materials Recently[J];Hydrometallurgy of China;2005-02
9 Jia Ying Fan Bingan Xu Guogen (The Second Artillery Engineering College Section 205, Xian 710025);Immobilized Photocatalytic Degradation of Unsymmetrical Dimethyl Hydrazine (UDMH) in Aqueous Solution by Using Supported TiO2 as Catalyst[J];Shanghai Environmental Sciences;2000-05
10 WANG Xiang, DAI Jia-lin, YANG Meng (College of Material Sci.& Eng. , Southwest Petroleum University, Chengdu 610500, China);Present Situation of Development and Application of Polymer Surfactant[J];China Plastics Industry;2007-S1
【Secondary References】
Chinese Journal Full-text Database 2 Hits
1 WEI Chang-cheng;WANG Hua;XU Ji-wen;ZHANG Xiao-wen;YANG Ling;CHEN Qi-song;School of Material Science and Engineering,Guilin University of Electronic Technology;;Study on the Resistance Switching Properties of Ag/La_(0. 67)Ca_(0. 33)MnO_3/p~+-Si Sandwich Devices[J];Journal of Synthetic Crystals;2015-03
2 HU Nan-jiang;LV Xiang-fei;ZHAO Ran;MA Hong-rui;TANG Wei;MA Chun-lin;College of Light Industry and Engergy,Shaanxi University of Science & Technology;College of Resource and Environment,Shaanxi University of Science & Technology;College of Electrical and Information Engineering,Shaanxi University of Science & Technology;College of Physical and Electronic Electrical Engineering,Huaiyin Normal University;;Preparation and photoelectrochemical property of black silicon with porous pyramid texture[J];Journal of Shaanxi University of Science & Technology(Natural Science Edition);2013-05
【Secondary Citations】
Chinese Journal Full-text Database 1 Hits
1 Yan Xiuru;Huo Mingliang; Wang Jianping;Wang Fei; Zeng Shulan (Department of Chemistry, Tianjin University. Tianjin 300072);The Influence of Acetic Acid and Glycerol on the Preparation of Strontium Titanate[J];CHINESE JOURNAL OF APPLIED CHEMISTRY;1996-02
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