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《Semiconductor Technology》 2005-05
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Optimum Design of the Technological Parameters for the Preparation of AZO Thin Films by Sol-Gel

GE Chun-qiao, XUE Yi-yu, HU Xiao-feng, GUO Ai-yun(Department of Material Science, Huazhong University of Science and Technology,Wuhan 430074, China)  
Optimum study of technological parameters for the preparation of AZO thin films by sol-gel is carried through orthogonal design. Optimum technological parameters are determined, whichprovide practicable approach for industrial control of the preparation of AZO thin films.
【CateGory Index】: TN304
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