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《Semiconductor Technology》 2005-08
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Application of OEE based on TOC

ZHU Hong, QIAN Xing-san (Research Institute of Industrial Engineering Microelectronics Development Research Center, University of Shanghai for Science and Technology, Shanghai 200093,China)  
Based on theory of OEE and TOC, and combining their advantages, the conception of IEE(Intrinsic Equipment Efficiency)is used to locate the bottle-neck. TPM is carried out to increase the overall efficiency of the system. A two-layer model comprised macroscopic and micro- scopic for data collecting and analyzing is introduced. A workflow model of a real time system used in wafer fabrication is developed.
【CateGory Index】: TN305
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