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《Semiconductor Technology》 2005-08
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The Wet Etching Study of the Uniform Grating DFB Semiconductor Laser

GAO Li-yan1, 2,CHEN Guo-ying1,HUA Ji-zhen2,ZHANG Shi-zu2,GUO Yan-ju1 (1.Micoelectronics Institute, College of Information Engineering, Hebei University of Technology, Tianjin 300130, China; 2.The 13th Research Institute , CETC, Shijiazhuang 050051, China)  
The etching processes of sub-micro grating for the uniform grating DFB lasers by wet etching electron lithographic using several wet etching solutions are studied. The etching instance is analyzed using SEM. By modifying the volume ratios of the HBr/HNO3/H2O, the good etching condition which is the optimum volume ratio (1:1:30) for etching InP at room temperature(23℃) was found. Using this etching solution, the etching grating images can satisfy the requirement of the DFB semiconductor lasers .
【Fund】: 国家自然科学基金资助项目(60476025);; 河北省自然科学基金资助项目(603080)
【CateGory Index】: TN248
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【Citations】
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【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 WU Zhan-chun, GU Wei-dong, WANG Xiao-yan, YUAN Feng-po (Hebei Semiconductor Research Institute,Shijiazhuang 050051,CHN);1.064 μm Pulsed High Power Quantum Well Laser Array[J];Semiconductor Optoelectronics;2002-02
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4 ZHOU Zhen, HUANG Yongqing, REN Xiaomin(Center of Optical Communication,Beijing University of Posts and Telecommunications, Beijing 100876, CHN);Wafer Bonding Technology and Its Applications in Vertical Cavity Devices[J];Semiconductor Optoelectronics;2003-04
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8 Zhao Yihao1,2,Chen Hongtai2,Chen Guoying1,Yang Hongwei2,Zhao Run2,Peng Haitao1,2(1.Dept.Info.& Engi.,Hebei University of Technology,Tianjin 300401,China;2.The 13th Research Institute,CETC,Shijiazhuang 050051,China);Numerical Study for High Efficiency 808 nm Laser Diode[J];Semiconductor Technology;2008-04
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1 QIAN Ling-xuan SHI Peng-cheng CHEN Jian-guo FENG Zhen-zhong (Department of Optoelectronics.Sichuan University,Chengdu,Sichuan 610064,China);Laser Diode Array High-Order Lateral Modes Phase Locking in External Cavity[A];[C];2005
2 SHAN Xiao-nan~(1,2) LU Guo-guang~(1,2) HE Chun-feng~(1,2) QIN Li~1 YAN Chang-ling~1 WANG Li-jun~1 1 Changchun Institute of Optics,Fine Mechanics and Physics,The Chinese Academy of Sciences,Changchun,Jilin 130033,China 2 Graduate School of the Chinese Academy of Sciences,Beijing 100039,China;980 nm Optical Pumped Semiconductor Vertical External Cavity Surface Emitting Semiconductor Laser[A];[C];2005
3 XIAO Hui-dong, QIU Zong-ming, GUO Yan-zhen, ZHAO Nian-nian (School of Mechanical and Instrumental Engineering, Xi'an University of Technology, Xi'an 710048);Experimental Study of a Non-contact Tracing Detector on Three Coordinate Measuring Machine Based on Semiconductor Laser[A];[C];2004
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