Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Semiconductor Technology》 2005-12
Add to Favorite Get Latest Update

Study on the New Method of CD Calibrating for IC Wafer

XUE Xiang-dong,WU Li-ming,DENG Yao-hua,WU Feng-jie,HE Zhong-kai(Information Engineering Institute,Guangdong University of Technology,Guang zhou 510643,China)  
A method of twice measure based on the standard component is presented,high-accuracy measurement for micro size is obtained.Through analysis and contrast of the experimental results,this method was obviously improved the precision compared with the law of standard component,and met the wide precision demands that measures of chip line of IC.
【Fund】: 广东省科技计划攻关项目(2004A10403008)
【CateGory Index】: TN405
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
Chinese Journal Full-text Database 3 Hits
1 WEN Wei-li1,ZUO Chun-cheng1,YU Jian-qun2,ZHANG Xue-jun1,LIU Qing-min1,CHEN Xiang-wei1,LIU Yan1(1.College of Mechanical Science and Engineering,Jilin University,Changchun 130022,China;2.School of Biological and Agricultural Engineering,Jilin University,Changchun 130022,China);Measurement of microchannels of PMMA microfluic chip[J];Optics and Precision Engineering;2007-02
2 WU Li-ming,CUI Shan-ling,WANG Li-ping,LIU Run-yu (Information Engineering School,Guangdong University of Technology,Guangzhou 510006,China);Novel automatic inspection method for repetitive patterned wafer[J];Optics and Precision Engineering;2008-05
3 Cui Shanling Wu Liming Xiao Leping (Information Engineering Institute,Guangdong University of Technology,Guangzhou 510006,China);Research on Inspection Method for IC Circuit Character[J];Computer Measurement & Control;2008-04
Chinese Journal Full-text Database 2 Hits
1 HE Zhong_hai,WANG Bao_guang,LIAO Yi_bai (State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China);Study of method for generating ideal edges[J];Optics and Precision Engineering;2002-01
2 WANG Jian min 1, PU Zhao bang 1, YIN Ji xue 2 (1 Herbin Institute of Technology, Herbin 150001, China) (2 Beijing Institute of Technology, Beijing 100081, China);Study on the operator of spatial moment based edge detection[J];OPTICAL TECHNOLOGY;1999-04
Chinese Journal Full-text Database 10 Hits
1 ;Electromagnetic Emission Test Method of Integrated Circuits[J];Safety & EMC;2007-01
2 YU Zheng-lin1, TAN Wei2, YANG Dong-lin1, CAO Guo-hua1 1.Institute of Electromechanical Engineering, Changchun University of Science and Technology, Changchun 130022, China; 2.School of Computer Science and Technology, Changchun University of Science and Technology, Changchun 130022, China;Automatic Detection of Steel Ball's Surface Flaws Based on Image Processing[J];兵工学报(英文版);2007-03
3 JING Xiao-cheng 1 ,YAO Ruo-he 1 ,WU Wei-guo 2 (1.Department of Applied Physics, South China University of Technology, Guangzhou 510641,China; 2. Advanced Technology Co.Ltd.,Zhuhai 519020,China);Research on Optimizing Etching Parameters of the Dry Etching for Silicon Dioxide[J];Semiconductor Technology;2005-06
4 PENG Zhi-hui, HUANG Qi-yu (School of Micro-Electronics, Shanghai Jiaotong University,Shanghai 200030, China);Study on the Supply System of Special Gases in Foundry[J];Semiconductor Technology;2005-08
5 ZHANG Zheng-rong1,2,ZHAN Yang2,WANG Hui1 (1.School of Microelectronics,Shanghai Jiao Tong University,Shanghai 200030,China;2.Semiconductor Manufacture International Corporation(Shanghai),Shanghai 201203,China);Advanced Method of Polysilicon Hard Mask Wet Etch[J];Semiconductor Technology;2007-12
6 Yang Yibo,Yin Wensheng,Wang Chunhong,Zhu Yu,Zhang Mingchao (Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China);Temperature Control System for High Temperature Oxidation Diffusion Furnace[J];Semiconductor Technology;2009-01
7 Liu Xinghui,Liu Tong(Shenyang Key Laboratory of Photoelectronic Devices and Detection Technology,College of Physics,Liaoning University,Shenyang 110036,China);Study on the Key Technology of 1N4626 Low-Noise Zener Diode[J];Semiconductor Technology;2009-05
8 Zhang Jin,Liu Yuling,Shen Xiaoning,Zhang Wei,Su Yanqin(Institute of Microelectronics Technology and Materials,Hebei University of Technology,Tianjin 300130,China);Study on the Removal Rate of CMP for Tungsten Plug in ULSI[J];Semiconductor Technology;2009-08
9 YUAN Yu-jie,LIU Yu-ling,ZHANG Yuan-xiang,CHENG Dong-sheng (Institute of Microelectronics,Hebei University of Technology,Tianjin 300130,China);Influencing Factory Analysis of Al Thin Film CMP[J];Micronanoelectronic Technology;2006-02
10 LI Qingli ,ZHANG Shaojun, Li Zhongfu, BAI Ymjiu, JIN Jian, GOU Zhongkui Mechanical Engineering School, University of Science and Technology Beijing, Beijing 100083, China Tangshan College, Tangshan 063000, China;A Improved Subpixel Edge Detecting Algorithm Based on Polynomial Interpolation[J];Journal of University of Science and Technology Beijing;2003-03
China Proceedings of conference Full-text Database 4 Hits
1 Wang Gui-tang, Liu Wen-hao, Lin Jin-xuan, Li Ke-ne, Wu Li-ming (GuangdongGuangzhou,Guangdong University of technology, Faculty of infonnation and engineering, 510643);The Analysis System of the Quantitative Phase and Micro-hardness[A];[C];2005
2 Qu Yufu Pu Zhaobang Wang Yaai (Department of Automatic Measurement and Control .Harbin Institute of Technology , Harbin 150001, China);Contrast Study of Subpixel Edge Detections in Vision Measuring System[A];[C];2003
3 Bu Quanlin Hu Dejin Zhang Yonghong (School of Mechanical and Power Engineering, Shanghai diaotong University, Shanghai 200030, China);Research on On-line Detection of Digital Curve Grinding Based on Image Recognition[A];[C];2005
4 Tan Gang Wu Jiali (Center of Advanced Sensor and Actuator, Chinese Academy of Engineering Physics, Mianyang 621900, China);Chemic-mechanical Polishing of Silicon Wafer[A];[C];2005
Chinese Journal Full-text Database 10 Hits
1 JIN Xiang-liang, CHEN Jie, QIU Yu-lin(Microelectronics Research and Development Center of the Chinese Academy of Sciences, Beijing 100029, China);Review on investigation and development for CMOS image sensor[J];Semiconductor Technology;2002-08
2 LIU Jian-shuang, XIE Feng, CHEN Yi, HU Gang(Dept. Material Science, Fudan University, Nat. Microanalysis Center, Shanghai 200433, China);Application of electron microscopy in analyzing memory device[J];Semiconductor Technology;2004-05
3 TIAN Li 1, LIU Xiao wei 1, WANG Xi lian 1, TIAN Lei 2, AO Ming sheng 1, XIONG Jun 1 (1. MEMS Center, Harbin Institute of Technology, Harbin 150001, China; 2. The 49th Research Institute, CETC , Harbin 150001, China);Design and experiment research of integrated capillary electrophoresis chip[J];Micronanoelectronic Technology;2003-Z1
4 YI Fu ting 1, JIANG Xiong ping 2, PENG Liang qiang 1, ZHANG Ju fang 1, HAN Yong 1 (1. Synchrotron Radiation Lab, Institute of High Energy Physics, CAS, Beijing 100039,China; 2. Institute for Drug Control of PLA, Beijing 100071,China);The research of biochip for electrophoresis[J];Micronanoelectronic Technology;2003-Z1
5 WEI Guo-hua,WU Si-liang,MAO Er-ke (Department of Electronic Engineering, School of Information Science and Technology, Beijing Institute of Technology, Beijing100081, China);Joint Frequency/Phase Difference/Amplitude Ratio Estimation Via Rotational Invariance Techniques——The ESPRIT Method[J];Journal of Beijing Institute of Technology;2004-02
6 Wei Hong He Peikun Mao Erke (Department of Electronics Engineering, Beijing Institute of Technology, Beijing100081);Frequency/Phase Estimation of Signal Via Rotational Invariance Techniques[J];JOURNAL OF BEIJING INSTITUTE OF TECHNOLOGY;1999-03
7 WEI Yuan-jie~ 1, LIU Chong~ 1* , LI Jing-min ~1, PENG Jia ~2, ZHU Lian-yi ~2 1 Key Laboratory for Micro/Nano Technology and System of Liao Ning Province, Dalian University of Technology, Dalian 116023,China; 2 Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology,Dalian 116023,China;Simulation of Plastic Flow in Microchannel Figuration of Microfluidic Chip Under Hot Embossing[J];Chinese Journal of Sensors and Actuators;2006-05
8 XU Min~1 , LUO Yi~ 1* ,WANG Xiao-dong~1 , LI Nan~2 , LIU Chong~2 1.The Key Laboratory for Dalian University of Technology Precision & Non-traditional Machining of Ministry of Education, Dalian 116023, China; 2.The Key Laboratory for Micro/Nano Technology and System of Liao Ning Province, Dalian 116023, China;Finite Element Analysis of Temperature Effect in Polymer Hot Embossing[J];Chinese Journal of Sensors and Actuators;2006-05
9 WANG Xiao-dong~1, CHANG Cheng~2, SONG Hong-xia~3 (1.Res Center for Micro System Techn,Dalian University of Technology, Dalian 116024,China; 2. Sch of Automation Engin,Harbin Engineering University, Harbin 150001,China; 3.Sch of Mech Engin,Dalian University of Technology, Dalian 116024,China);Scanning probe microscopy for micro-geometry measurement[J];Journal of Transducer Technology;2003-09
10 LIU Fu-lai, WANG Jin-kuan, YU Ge(School of Information Science & Engineering, Northeastern University, Shenyang 110004, China.;OS-ESPRIT Algorithm[J];JOURNAL OF NORTHEASTERN UNIVERSITY;2004-11
China Proceedings of conference Full-text Database 1 Hits
1 Wei He Wang Xiaodong Liu Chong Liao Junfeng Key Lab for Precision and Non -traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian, 116023;Bonding Simulation of Ultrasonic Welding Method for Plastic Microfluidic Chip[A];[C];2005
【Secondary References】
Chinese Journal Full-text Database 5 Hits
1 XIONG Bang-shu,LEI Ling,XU Jing-hua(School of Electronic and Information Engineering,Nanchang Hangkong University,Nanchang 330063,CHN);Image-based Line Width Measurement System[J];Semiconductor Optoelectronics;2008-06
2 CAO Guo-bin,LIU Xue-jiao,WANG Hua (The 2nd Research Institute of CETC,Taiyuan 030024,China);Outline of Image and Machine Vision Technology[J];Equipment for Electronic Products Manufacturing;2008-08
3 LIU Dan-ping,DUAN Qin-yi,LI Yun-wei,LIU Xiao-ming, LI Zheng-zhou(College of Communication Engineering,Chongqing University,Chongqing 400030,China);Initial target region estimation suitable to optical tracking[J];Optics and Precision Engineering;2008-11
4 WU Fu-pei,KUANG Yong-cong,ZHANG Xian-min,OUYANG Gao-fei(School of Mechanical and Automotive Engineering,South China University of Technology,Guangzhou 510640,China);Pattern matching and parameter adaptive based PCB solder joint inspection[J];Optics and Precision Engineering;2009-10
5 PANG Zhong-hua,SONG Man-cang,LIU Ying,ZHANG Jin-ying(Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education,Dalian University of Technology,Dalian,Liaoning 116023,China);Present Situation and Development of Microfluidic Chips[J];Plastics;2010-03
【Secondary Citations】
Chinese Journal Full-text Database 7 Hits
1 XU Sheng, LI Jian wei (Open Laboratory of Optoelectronic Technology & System,National Committee of Education, Chongqing University, Chongqing 400044,China);An Advanced Microscope System Based on the Intelligent Automatic Focusing[J];OPTO-ELECTRONIC ENGINEERING;2000-01
2 WANG Ren hua, SHEN Mang zuo (Institute of Optics & Electronics, Chinese Academy of Sciences,Chengdu 610209,China);An Algorithm Study for Automatic Focusing[J];Opto-electronic Engineering;2000-04
3 WANG Jian Min,PU Zhao Bang,LIU Guo Dong (Haerbin Institute of Technology,Haerbin 150001);The Research of Subpixel Algorithms of Improving the Accuracy of Image Measuring Systems[J];OPTICS AND PRECISION ENGINEERING;1998-04
4 GUO Yan zhen, QIU Zong ming, LI Xin, WANG Ji hui (Xi’an University of Technology,Xi’an 710048,China);A Method of Tuning Focus for Image Measurement Technology[J];Journal of Xi'an University of Technology;2001-01
5 Bai Lifen Xu Yuxian Yu Shui Li Qingxiang (Dept. of Precision Instrument and Mechanology of Tsinghua Univ.Beijing 100084);Study on the Microscope Auto focus Method Based on Image Processing[J];CHINESE JOURNAL OF SCIENTIFIC INSTRUMENT;1999-06
6 Wu Xiao-bo; Zhong Xiao-xin; Liu Hou-quan (Dept,of Optoelectronic Precision Instrument of Chongqing University)Zhang Qi-ming (Dept. of Computer Science of Chongqing University);Improving Resolution of CCD Camera in Dimensional Measurement by Polynominal Interpolation[J];CHINESE JOURNAL OF SCIENTIFIC INSTRUMENT;1996-02
7 FU Zhong liang (Chengdu Institute of Computer Application, Academia Sinica, Chengdu 610041);The Making of Method for Image Threshold Selection[J];JOURNAL OF IMAGE AND GRAPHICS;2000-06
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved