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《Semiconductor Technology》 2005-12
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Study on the New Method of CD Calibrating for IC Wafer

XUE Xiang-dong,WU Li-ming,DENG Yao-hua,WU Feng-jie,HE Zhong-kai(Information Engineering Institute,Guangdong University of Technology,Guang zhou 510643,China)  
A method of twice measure based on the standard component is presented,high-accuracy measurement for micro size is obtained.Through analysis and contrast of the experimental results,this method was obviously improved the precision compared with the law of standard component,and met the wide precision demands that measures of chip line of IC.
【Fund】: 广东省科技计划攻关项目(2004A10403008)
【CateGory Index】: TN405
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