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《Semiconductor Technology》 2006-10
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Vacuum Evaporation and Film Properties of Mg/Ag Cathodes in Organic Light-Emitting Display(OLED)

LIU Qiana, ZhANG Fang-huia, LI Ya-lib (a. School of Electric and Electronic Engineering, b. School of Materials Science and Engineering, Shanxi University of Science and Technology, Xi'an, 710021,China)  
The vacuum evaporation of Mg and Ag cathodes was presented. The pressure increases rapidly when the evaporation current of Mg cathode is about 85A, but Mg atoms are not evaporated to the glass substrate. As the pressure value approximately drops to the value before increasing, that is, 2.6×10-3Pa, Mg atoms begin to be evaporated to the glass substrate, which is quite different from the evaporation process of other metals such as Ag. Studies show that heat treatment makes the Mg thin film denser, the surface roughness reduced and the adhesion force increased.
【Fund】: 国家自然科学基金(50372038);; 陕西省教育厅产业化基金项目(06CJ23)
【CateGory Index】: O484.1
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