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《Semiconductor Technology》 2007-05
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Microchannel Plate Cleaning Technique

WANG Yi-jun1,YAN Cheng2,ZENG Gui-lin2(1.Department of Physics,Xianyang Normal College,Xianyang 712000,China;2.North Night Vision Technology Co.,Ltd.,Xi'an 710100,China)  
According to the characteristics of material and construction of microchannel plate,the type and origin of contamination in the process of manufacturing microchannel plate(MCP) were analyzed and categorized.Contra-posing the type and category different contaminations,the corresponding cleaning methods including chemical and physical cleaning were described,primarily including cleaning technique of organism,cleaning liquid,ultrasonic etc.Cleaning solution and technology parameters in different procedures of manufacturing MCP are confirmed by theoretically analysis and experiments.The effective cleaning method was provided for improving the surface quantity of MCP.
【CateGory Index】: TN152;TN305.97
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【References】
Chinese Journal Full-text Database 3 Hits
1 Yan Cheng1,Wang Yijun2,Zhang Zhengjun1,Su Detan1,Cong Xiaoqing1,Wang Ruiting3(1.North Night Vision Technology Co.,Ltd.,Beijing 100089,China;2.Dept.of Physics,Xianyang NormalCollege,Xianyang 712000,China;3.Beijing Sevenstar Huachuang Electronic Co.,Ltd.,Beijing 100016,China);Development of Cleaning Equipment for Microchannel Plate[J];Semiconductor Technology;2008-03
2 WANG Yi-jun1,2,YAN Cheng3,CONG Xiao-qing3,ZHANG Zheng-jun3,SUN Jian-ning3,ZHAO Hui-min3(1.School of Science,Northwestern Polytechnical University,Xian 710072,China)(2.Department of Physics,Xianyang Normal College,Xianyang 712000,China)(3.North Night Vision Technology Co.,Ltd,Beijing 100089,China);Microstructure defects of microchannel plate and its mechanism[J];Optical Technique;2008-05
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【Citations】
Chinese Journal Full-text Database 4 Hits
1 LI Ren(The 45th Research Institute,CETC,Beijing 101601,China);Semi-conductor IC cleaning technology[J];Semiconductor Technology;2003-09
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【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 CHENG Li1, LI Chun-ming2,WANG Zhen-yu1, GAO Ping1(Institute of Electricity & Information, Jiangsu University, Zhenjiang 212013, China);The measures of new technology & development in IC industrial chain[J];Semiconductor Technology;2004-06
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3 SHENG Jin-long (Beijing Sevenstar Huachuang Elecronics Co.,Ltd., Beijing 100016, China);Analysis of Development for Cleaning Technique on IC Manufacture[J];Semiconductor Technology;2006-03
4 CHENG Li,LI Jia-yuan,LI Lan,LI Hua-le,WANG Zhen-yu (Institute of Electricity and Information, Jiangsu University, Zhenjiang 212013, China);Novel Environment Protection and Clean Technologies for Wafer[J];Semiconductor Technology;2006-10
5 ZHANG Hui,CHENG Li,HAN Qing-fu,YAN Xue-ping,LIU De-lin,XU Zhi-chun,LI Jun(Institute of Electricity and Information,Jiangsu University,Zhenjiang 212013,China);Novel Clean Technologies for Nanometer Particles of Si Surface[J];Semiconductor Technology;2007-04
6 YAN Cheng1,WANG Yi-jun2,DENG Guang-xu1 (1.North Night Vision Technology Co.,Ltd.,Xi'an 710100,China;2.Department of Physics,Xianyang Normal College,Xianyang 712000,China);Study on Microchannel Plate Etching Technique[J];Semiconductor Technology;2007-06
7 WANG Yi-jun1,YAN Cheng2,DENG Guang-xu2,ZHANG Zheng-jun2,SU Detan2,LI Zhou-kui2(1.Department of Physics,Xianyang Normal College,Xianyang 712000,China;2.North Night Vision Technology Co.,Ltd.,Beijing 100089,China);Research on the Third Generation Microchannel Plate Memory Effect[J];Semiconductor Technology;2007-07
8 YAN Cheng1,JIN Ge1,WANG Yi-jun2,ZHANG Zheng-jun1,SUN Jian-ning1,SU De-tan1 (1.North Night Vision Technology Co.,Ltd,Beijing 100089,China;2.Department of Physics,Xianyang Normal College,Xianyang 712000,China);Microchannel Plate Double-Sided Polishing Technology[J];Semiconductor Technology;2007-08
9 Yan Cheng1,Wang Yijun2,Zhang Zhengjun1,Su Detan1,Cong Xiaoqing1,Wang Ruiting3(1.North Night Vision Technology Co.,Ltd.,Beijing 100089,China;2.Dept.of Physics,Xianyang NormalCollege,Xianyang 712000,China;3.Beijing Sevenstar Huachuang Electronic Co.,Ltd.,Beijing 100016,China);Development of Cleaning Equipment for Microchannel Plate[J];Semiconductor Technology;2008-03
10 WEI Zhen-biao,YANG Ming,YU Zheng-Gen(Armored Force Technology Institute,Changchun 130117,China);The Application Study of the Armor Vehicle Power Device Cooling System Efficiently Compound Lotion[J];Vehicle & Power Technology;2008-03
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 LI Ren(The 45th Research Institute,CETC,Beijing 101601,China);Semi-conductor IC cleaning technology[J];Semiconductor Technology;2003-09
2 SUN Yu-hui, KANG Ren-ke, GUO Dong-ming, JIN Zhu-ji, SU Jian-xiu(School of Mechanical Engineering, University of Dalian Technology, Dalian 116024,China);The mounting technology in chemical mechanical polishing (CMP)[J];Semiconductor Technology;2004-04
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6 Yan Cheng1,Wang Yijun2,Zhang Zhengjun1,Su Detan1,Cong Xiaoqing1,Wang Ruiting3(1.North Night Vision Technology Co.,Ltd.,Beijing 100089,China;2.Dept.of Physics,Xianyang NormalCollege,Xianyang 712000,China;3.Beijing Sevenstar Huachuang Electronic Co.,Ltd.,Beijing 100016,China);Development of Cleaning Equipment for Microchannel Plate[J];Semiconductor Technology;2008-03
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