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《Semiconductor Technology》 2008-05
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Novel MEMS Gas Sensor and Its Theoretical Model

Yan Jun,Chen Xiangdong,Li Hui,Su Feng,Luo Xuesong (College of Information Science & Technology,Southwest Jiaotong University,Chengdu 610031,China)  
A novel MEMS gas sensor was proposed based on piezoresistive effect,which was composed of a Si membrane embedded with a piezoresistive Wheatstone bridge,and a gas-sensitive polymer layer.The gas induced volume change of the gas-sensitive lead to a deformation of the Si membrane.A theoretical model of the interaction between Si membrane and polymer layer was presented based on elastic mechanics theory,and an equivalent transverse gas load qg was achieved.Finally a output expression of the gas sensor was proposed.Theoretically,the output of the gas sensor is linear and with some other advantages,such as simple structure,without heating elements,can be integrated with signal processing circuit using the MEMS processes.
【Fund】: 国家自然科学基金资助项目(60572026);; 四川省学术与技术带头人培养基金重点资助项目(Q024131103010018);; 西南交通大学科技发展基金(2006A05)
【CateGory Index】: TP212
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