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《Semiconductor Technology》 2008-06
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Advancement of Al Doped ZnO Flexible Transparent Conducting Thin Film

Zhang Huafu,Yuan Yuzhen,Liu Hanfa,Liu Yunyan (School of Physics and Optic-Electronic Information,University of Technology of Shandong,Zibo 255049,China)  
Owing to its excellent optic-electronic properties,rich in resources,low cost and innocuity,flexible transparent conducting film ZAO becomes a focus of research.The treatments of flexible substrate are discussed,the history and development of flexible transparent conducting films are analyzed,the micro-structure and properties of ZAO film,the typical preparation techniques,the application prospect are introduced,the research developments of this material,and the future work to be done in ZAO thin film research and application fields are reviewed.
【Fund】: 国家自然科学基金资助项目(50402019)
【CateGory Index】: TB383.2
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