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《Semiconductor Technology》 2008-06
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Shape Parameter Evaluation of Weibull Distribution Based on Least Squares Support Vector Machine

Zou Xinyao,Yao Ruohe (Institute of Microelectronics,School of Electron and Information Engineering,South China University of Technology,Guangzhou 510640,China)  
Weibull distribution is often used to describe the lifetime of parts and widely applied to characterize the breakdown statistics of solid dielectric samples.Weibull shape parameter β is a crucial parameter as it characterizes the failure rate trend of solid dielectric,hence,it should be estimated accurately.A new method was proposed based on least square support vector machine(LSSVM) to determine the shape parameters β according to the scarcity of failure data.This method was applied to the reliability estimation of the time dependent dielectric breakdown(TDDB) life data of MOS capacitors.Least square regression(LSR) was also compared with it.The obtained results show that LSSVM has higher accuracy(smaller mean square error)and better robustness than LSR in determining Weibull slope β with small sample.
【CateGory Index】: TN301
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