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《Semiconductor Technology》 2009-03
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Z-Axis Movement Signal Analysis of Capillary for Wire Bonding

Gan Haitao,Gao Jian,Chen Xin(Faculty of Electromechanical Engineering,Guangdong University of Technology,Guangzhou 510090,China)  
Capillary is the key component of the automatic wire bonder,the collection and analysis of the capillary movement signal have important significance on the improving and studying of the micro-electronics equipment manufacture and techniques.Through laser Doppler non-contact test method and effective optical design,the Z-axis movement signal of capillary was acquired from the actual thermosonic bonding.A detailed time domain analysis on the test signal was done,including displacement,velocity and acceleration analysis.A clear description of the dynamic changes of capillary Z-axis movement during the bonding process was achieved.Finally,the phenomenon of velocity instability under the search level(tip-offset)was analyzed.
【Fund】: 广东省科技攻关项目(2005A10403004 2006A10401003)
【CateGory Index】: TN405
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