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《Semiconductor Technology》 2009-09
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Study of Electrochemical Oxidation of New Type of Cleaning Method with BDD Film Anode

Gao Baohong1,Liu Yuling1,Zhu Yadong2,Liu Xiaoyan1(1.School of Information Engineering,Hebei Technology University,Tianjin 300130,China;2.School ofElectronic Information and Communication Engineering,Tianjin University of Technology,Tianjin 300191,China)  
To improve the RCA cleaning method,as well as ozone and hydrogen peroxide wet cleaning technology,a new cleaning method was developed to generate peroxide using of the boron-doped diamond (BDD) films as anode in electrochemical oxidation technology,with simplification equipment,which could also save energy.In order to study the oxidation capacity of electrochemical oxidation with diamond film electrode,the peroxide oxidation concentration with different concentration of raw materials to show the result.It also studies the impact of peroxide was measured by changing the pH value of the electrochemical preparation.The experimental results show that the electrochemical oxidation with diamond films anode is under control by adjusting the electrolyte concentration and the pH value.It also shows that the result in roughness of the surface cleaned by this new method is better than that by the traditional RCA cleaning method.And it is more energy saving and environmental protection.
【Fund】: 02国家重大专项(2009zx02308);; 国家自然科学基金(10676008);; 教育部博士基金(20050080007)重点学科资助
【CateGory Index】: TB490
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