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《Semiconductor Technology》 2009-09
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Study of Electrochemical Oxidation of New Type of Cleaning Method with BDD Film Anode

Gao Baohong1,Liu Yuling1,Zhu Yadong2,Liu Xiaoyan1(1.School of Information Engineering,Hebei Technology University,Tianjin 300130,China;2.School ofElectronic Information and Communication Engineering,Tianjin University of Technology,Tianjin 300191,China)  
To improve the RCA cleaning method,as well as ozone and hydrogen peroxide wet cleaning technology,a new cleaning method was developed to generate peroxide using of the boron-doped diamond (BDD) films as anode in electrochemical oxidation technology,with simplification equipment,which could also save energy.In order to study the oxidation capacity of electrochemical oxidation with diamond film electrode,the peroxide oxidation concentration with different concentration of raw materials to show the result.It also studies the impact of peroxide was measured by changing the pH value of the electrochemical preparation.The experimental results show that the electrochemical oxidation with diamond films anode is under control by adjusting the electrolyte concentration and the pH value.It also shows that the result in roughness of the surface cleaned by this new method is better than that by the traditional RCA cleaning method.And it is more energy saving and environmental protection.
【Fund】: 02国家重大专项(2009zx02308);; 国家自然科学基金(10676008);; 教育部博士基金(20050080007)重点学科资助
【CateGory Index】: TB490
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【Citations】
Chinese Journal Full-text Database 1 Hits
1 YU Jie-fei, ZHOU Liang, WANG Ya-lin, JIA Jin-ping (College of Environmental Science and Engineering, Shanghai Jiaotong University, Shanghai 200240, China);Study on the Degradation of Dye Solution Using Boron-doped Diamond Thin Film Eelectrode[J];Journal of Chemical Engineering of Chinese Universities;2004-05
【Co-citations】
Chinese Journal Full-text Database 7 Hits
1 WU Jin1,2,DU Lin1,LI Guiying 1,HU Changwei1*(1.Key Laboratory of Green Chemistry and Technology(Sichuan University),Ministry of Education,College of Chemistry,Sichuan University,Chengdu,Sichuan 610064,China;2.Yibin Health School,Yibin,Sichuan 644000,China);Study on Electro-catalytic Oxidative Degradation of Reactive Brilliant Red K-2BP on RuOx -PdO/Ti Electrode[J];Precious Metals;2006-04
2 SONG Xiao-rui,ZHANG Ai-li,JIA Bao-jun,LIU Wei-li,WAN Ying, ZHU Qun-li,ZHOU Ji-ti(School of Environmental and Biological Science and Technology,Dalian University of Technology,Dalian 116023,China);Packed Bed-Multiphase Catalytic Reactor Oxidation Process for Treatment of Nitrobenzene Wastewater[J];China Water & Wastewater;2006-15
3 ZHOU Yan-wei, FAN Li, YANG Wei-shen, YANG Feng-lin (Laboratory of Environmental Electrochemistry, School of Environmental & Biological Science and Technology, Dalian University of Technology, Dalian 116024, China);Electrochemical Decolorization of Amaranth Solution on ACF Electrode under Galvanostatic Model[J];Journal of Chemical Engineering of Chinese Universities;2006-02
4 HU Xiao-jun, CAO Hua-zhen, ZHENG Guo-qu, CAO Shuai (College of Chemical Engineering and Material Science, Zhejiang University of Technology, Hangzhou 310014, China);The Influences of Boron-doping Concentration on the Electrochemical Properties of Diamond Film Electrode[J];Journal of Chemical Engineering of Chinese Universities;2006-06
5 Yuan Huihui,Zhong Dengjie,Fang Ning,Xu Yunfeng,Jia Jinping(School of Environmental Science and Engineering,Shanghai Jiaotong University,Shanghai 200240,China);Treatment of Wastewater Containing Reactive Brilliant Red X-3B by Electrochemical Rotating-disc Process[J];Environmental Protection of Chemical Industry;2006-05
6 Fang Ning,Jia Jinping,Zhong Dengjie,Wang Yalin.(Department of Environmental Science and Engineering,Shanghai Jiaotong University,Shanghai 200240);Application of boron-doped diamond electrodes in water treatment[J];Environmental Pollution & Control;2007-09
7 CHEN Xing-feng,DAI Jun-zhi,HUANG Ming-min,ZUO Dun-wen,ZHOU Liang,KANG Jing(College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China);Experimental Study on Boron-Doped Diamond Thick Film as Electrode for Wastewater Treatment[J];Machine Building & Automation;2008-04
【Secondary Citations】
Chinese Journal Full-text Database 4 Hits
1 HE Chun 1,2* ,AN Tai_cheng 1,XIONG Ya 1* ,SHU Dong 2,HU Hui_ling 1,ZHU Xi_hai 1 (1.School of Chemistry and Chemical Engineering,Zhongshan University, Guangzhou 510275,China; 2.Department of Chemistry,Zhaoqing College, Zhaoqing 526061,China;Electrochemical Degradation of Organic Wastewater by Three-Dimensional Electrode Reactor[J];Electrochemistry;2002-03
2 ZHU Peilin;ZHU Jianzhong;YANG Shenzhong;ZHANG Guoxiong(Shanghai Institute of Metallurpy,Chinese Academy of Sciences, Shanghai 200050);ELECTROCHEMICAL CHARACTERIZATION OF BORON-DOPED DIAMOND THIN FILM ELECTRODE[J];JOURNAL OF FUNCTIONAL MATERIALS AND DEVICES;1996-04
3 CHEN Yin-sheng, ZHANG Xin-sheng, DAI Ying-chun, YUAN Wei-kang (East China University of Science and Technology, UNILAB of Chemical Reaction Engineering, Shanghai 200237, China);Study of Degradation of p-Chlorophenol in Aqueous Solution with Pulsed Corona Discharge Plasma[J];Journal of Chemical Engineering of Chinese Universities;2003-01
4 ZHOU Minghua and WU Zucheng (Department of Environmental Science and Engineering,Zhejiang University, Hangzhou 310027,Zhejiang,China);ELECTROCATALYTIC DEGRADATION OF PHENOL-CONTAINING WASTEWATER[J];Journal of Chemical Industry and Engineering(China);2002-01
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