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《Semiconductor Technology》 2012-04
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Neural Network Based Intelligent R2R Predictive Control to CMP Process

Wang Liang1,2,3,Hu Jingtao1(1.Key Laboratory of Industrial Informatics,Shenyang Institute of Automation,Chinese Academy of Sciences, Shenyang 110016,China;2.Graduate School of the Chinese Academy of Sciences,Beijing 100039,China; 3.Shenyang University of Chemical Technology,Shenyang 110142,China)  
For chemical mechanical polishing(CMP)process characteristics of nonlinear,time-varying and not being in-situ easily measured,CMP process neural network run-to-run(R2R) predictive controller named NNPR2R was proposed.Radial basis function(RBF) neural network predictive model about CMP was constructed by subtractive clustering algorithms and least squares method,thus the difficult problem of constructing accurate mathematical model of complicated CMP process was solved and the prediction accuracy was improved.Control law was calculated by particle swarm optimization(PSO) rolling optimization,therefore the problem that the derivative-based optimization technology was easy to fall into local optimum was solved and the control precision was improved.Simulation results illustrate that the performance of NNPR2R controller is better than that of EWMA,process drifts and shifts are suppressed significantly,variation in various runs of products is reduced,and the root mean squared error for material removal rate(MRR) is brought down substantially.
【Fund】: 国家科技重大专项(2009ZX02008-003 2009ZX02001-005);; 沈阳市科技计划项目(108155-2-00)
【CateGory Index】: TN305
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【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 LIU Zai-lun,CHE Qin-qin(College of Fluid Power and Control,Lanzhou University of Technology,Lanzhou,Gansu 730050,China);Test system on centrifugal pump performance based on RS485[J];Drainage and Irrigation Machinery;2007-05
2 CHENG Di,YU Jie (Department of Chemistry,Xinxiang Medical University,Xinxiang 453003,China);Application of Neural Network Based on PSO in Simultaneously Analyzing As(Ⅲ) and As(Ⅴ) Using Spectrophotometer Analysis[J];Journal of Xinxiang University(Natural Science Edition);2009-02
3 Shen Zhongjie, Wang Wuhong & Zhong Yonggang Beijing Institute of Technology, Beijing 100081;Digital Vehicle Control Based on Machine Vision in Intelligent Traffic System[J];Automotive Engineering;2003-05
4 CUI Sheng-min,LI Jian-ru(Automobile Engineering School of Harbin Institute of Tech-nology,Weihai264209,China)p36-37;A vehicle braking performance test system based on virtual instrument[J];Automobile Science and Technology;2004-05
5 Zhao Shengzhan1 Gu Yangyang1 Fan Xiaochun2(1 92941 Unit 96 Element,Huludao 125000,China;2 Beijing Institute of Structure and Environment Engineering,Beijing 100076,China);The method of constructing and solving the characteristic equation of the data calibrating of telemetry[J];Structure & Environment Engineering;2010-04
6 MA Zhao_kun ①, MA Yue_feng ② (①Yanzhou TV Univeristy, 272100, Yanzhou; ②Institute of Operation Research, Qufu Normal University, 273165, Qufu, Shandong);A NEW METHOD FOR FINDING ROOTS OF POLYNOMIAL EQUATION[J];JOURNAL OF QUFU NORMAL UNIVERSITY(NATURAL SCIENCE);2000-03
7 SHA Yong1,WANG Shi-gang1,LV Ze-han2(1.Qiqihar University,Heilongjiang Qiqihar 161006,China;2.91917 Armed Forces of Chinese People’s Liberation Army,Beijing 102401,China);Machining quality prediction technology based on multi-sensor data fusion[J];Journal of Qiqihar University(Natural Science Edition);2009-05
8 Zhang Yong Zeng Xin Pan Jie(School of Automotive Engineering,South China University of Technology,Guangzhou Guangdong 510640,China);Numerical Analysis and Experimental Investigation of Oil Spectrum Measurement for the Parts of the Powertrain[J];Lubrication Engineering;2008-05
9 WANG Wei-bo(School of Electrical and Information Engineering,Xihua University,Chengdu 610039 China),LIN Chuan,et al.;Experiment and Analysis of Parameters in Particle Swarm Optimization[J];Journal of Xihua University(Natural Science Edition);2008-01
10 CHEN Lei LIU Yong-shan(School of Aerospace Engineering,Beijing Institute of Technology,Beijing 100081,China);Design and simulation for Missile Roll Autopilot[J];Journal of Chongqing Three Gorges University;2012-03
【Secondary Citations】
Chinese Journal Full-text Database 10 Hits
1 WANG Zheng ou 1, ZHAO Chang hai 2 (1.Institute of Systems Engineering,Tianjin University,Tianjin 300072,China; 2.The 8357 Research Institute of the 3rd Research Academy of China Space Industry Corporation,Tianjin 300141,China);IDENTIFICATION OF NONLINEAR TIME VARYING SYSTEM USING FEEDFORWARD NEURAL NETWORKS[J];天津大学学报(英文版);2000-01
2 DOU Chun-xia (Yanshan University, Qinghuangdao 066004, China);Fuzzy Forecast Controller Based on Chaos Neural Network Model Research and Its Application[J];Acta Simulata Systematica Sinica;2002-10
3 ZHANG Guang-ying, DENG Zheng-long, LIN Yu-rong (Dept. of Control Science and Engineering, Harbin Institute of Technology, Harbin 150001, China);Predictive Control of Nonlinear Model Based on Neural Network[J];Acta Simulata Systematica Sinica;2003-02
4 ZHOU Li-hui, HAN Pu, SUN Hai-rong (Dept. of Power Engineering, North China Electric Power University, Baoding 071003,China);A Strategy of Neural Network Predictive Control with Constraints[J];Acta Simulata Systematica Sinica;2003-05
5 CHENG Hong-liang, ZHANG Guo-xian, BAO Hai-kun (School of Mechatronic Engineering and AutomationShanghai University, Shanghai,200072,China);The Design and Simulation of a Self-Tuning Predictive Control Based on Neural Network Optimized by Genetic Algorithm[J];Acta Simulata Systematica Sinica;2003-05
6 WANG Lei, CHEN Zong-hai, ZHANG Hai-tao, QIN Ting (Dept. of Automation, University of Science and Technology of China, Hefei 230027, China);Study of Hybrid Modeling Strategy for Complex Processes[J];Acta Simulata Systematica Sinica;2004-08
7 WEI Dong1,2, ZHANG Ming-lian1, ZHI Jin2 (1School of Automation Science and Electrical Engineering, Beijing University of Aeronautics and Astronautics, Beijing 100083, China; 2Department of Electrical Engineering and Automation, Beijing Institute of Civil Engineering and Architecture, Beijing 100044, China);Artificial Neural Network-Based Nonlinear Predictive Optimal Control and Simulation[J];Acta Simulata Systematica Sinica;2005-03
8 LIN Mao qiong\ CHEN Zeng qiang\ YUAN Zhu zhi (Department of Computer & System Sciences, Nankai University,Tianjin\ 300071);SELF-TUNING CONTROLLER FOR NEURAL NETWORK PREDICTIVE DEVIATION COMPENSATION BASED ON DAMPED LEAST SQUARE[J];INFORMATION AND CONTROL;2000-01
9 ZHANG A bu\ HUANG Wei bin (Dept. of Automation, Xiamen University, Xiamen\ 361005);TRAINING OF DIAGONAL RECURRENT NEURAL NETWORK PREDICTIVE CONTROLLER USING GENETIC ALGORITHMS[J];INFORMATION AND CONTROL;2000-01
10 ZHANG Hai-tao, CHEN Zong-hai, Qin Ting, Wang Lei, Xiang Wei(Department of Automation, University of Science and Technology of China, Hefei230027, China);A Laguerre Function Model Adaptive Predictive Control Strategy Based on a Chaotic Neural Network for Heavy Oil Distillation Column[J];Information and Control;2004-01
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