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《Semiconductor Technology》 2012-04
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Neural Network Based Intelligent R2R Predictive Control to CMP Process

Wang Liang1,2,3,Hu Jingtao1(1.Key Laboratory of Industrial Informatics,Shenyang Institute of Automation,Chinese Academy of Sciences, Shenyang 110016,China;2.Graduate School of the Chinese Academy of Sciences,Beijing 100039,China; 3.Shenyang University of Chemical Technology,Shenyang 110142,China)  
For chemical mechanical polishing(CMP)process characteristics of nonlinear,time-varying and not being in-situ easily measured,CMP process neural network run-to-run(R2R) predictive controller named NNPR2R was proposed.Radial basis function(RBF) neural network predictive model about CMP was constructed by subtractive clustering algorithms and least squares method,thus the difficult problem of constructing accurate mathematical model of complicated CMP process was solved and the prediction accuracy was improved.Control law was calculated by particle swarm optimization(PSO) rolling optimization,therefore the problem that the derivative-based optimization technology was easy to fall into local optimum was solved and the control precision was improved.Simulation results illustrate that the performance of NNPR2R controller is better than that of EWMA,process drifts and shifts are suppressed significantly,variation in various runs of products is reduced,and the root mean squared error for material removal rate(MRR) is brought down substantially.
【Fund】: 国家科技重大专项(2009ZX02008-003 2009ZX02001-005);; 沈阳市科技计划项目(108155-2-00)
【CateGory Index】: TN305
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【Citations】
Chinese Journal Full-text Database 4 Hits
1 WU Xue-jiao,SUN Ming-xuan(College of Information Engineering,Zhejiang University of Technology,Hangzhou 310023,China);Modeling of Nonlinear Time-varying System Based on Time-varying RBF Networks[J];Computer Engineering;2010-23
2 WANG Xudong and SHAO Huihe(Research Institute of Automatic Control .Shanghai Jiaotong University. Shanghai, 200030,PRC);Nonlinear System Modeling Using the Radial Basis Function Neural Networks[J];CONTROL THEORY & APPLICATIONS;1997-01
3 DAI Wen-zhan1,LOU Hai-chuan1,YANG Ai-ping2(1.Department of Automatic Control,Zhejiang Sci-Tech University,Hangzhou Zhejiang 310018,China;2.Zhejiang University of Finance and Economics,Hangzhou Zhejiang 310035,China);An overview of neural network predictive control for nonlinear systems[J];Control Theory & Applications;2009-05
4 XIE Xiao-feng, ZHANG Wen-jun, YANG Zhi-lian(Institute of Microelectronics, Tsinghua University, Beijing 100084, China);Overview of particle swarm optimization[J];Control and Decision;2003-02
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 SUN Yuping,MA Hongwei,FENG Donghai(School of Civil Engineering,Lanzhou University of Technology,Lanzhou 730050,China);The analysis of internal force for steel frame with semi-rigid connections[J];Sichuan Building Science;2008-03
2 SUN Jing-jing(School of Physics and Material Science,Anhui University,Hefei 230039,China);Detecting high frequency weak signal using frequency shifting stochastic resonance[J];Journal of Anhui University(Natural Sciences Edition);2010-01
3 XIA Hui1,JIN Jing-quan2(1.Telephone Communication Stations,The People's Government Department of AnHui Province,Hefei 230006,China;2.Dept.of Com.Sci.,Nanjing Normal University,Nanjing 210042,China);A single input-single output cerebllar model articulation controller[J];Journal of Anhui University of Technology and Science(Natural Science);2008-02
4 HU Yu?han,ZHANG Da?qing,SUN Jia?jun(Dept. of Mathematics and Physics,Anshan Institute of I.& S.Technology,Anshan 114002,China);An Interval Iterative Solution of Nonlinear Equation[J];Journal of Anshan Institute of Iron and Steel Technology;2000-05
5 Wang Liang1,2,3,Hu Jingtao1(1.Key Laboratory of Industrial Informatics,Shenyang Institute of Automation,Chinese Academy of Sciences,Shenyang 110016,China; 2.Graduate School of the Chinese Academy of Sciences,Beijing 100039,China; 3.Shenyang University of Chemical Technology,Shenyang 110142,China);LS-SVM Based R2R Predictive Control for Lithography Process[J];Semiconductor Technology;2012-06
6 Yu Tao, GE Yun shan (National Lab of Auto Performance and Emission Test,Beijing Institute of Technology,Beijing 100081, China);Simulation Study of Vehicle performance[J];Acta Armamentarll The Volume of Tank, Armored Vehicle and Engine;2001-02
7 DAI Xu wen, GU Zhong li, LIU Jian (School of Vehicle and Transportation Engineering,Beijing Institute of Technology,Beijing 100081,China);Kinematics Analysis and Calculation of the Double-Wishbone Independent Suspension of Wheeled-Vehicle[J];Acta Armamentarll The Volume of Tank, Armored Vehicle and Engine;2002-02
8 PENG You-yu,LIU Guang-zheng,GUO Xiao-yan(China North Vehicle Research Institute,Beijing 100072,China);the FEA of Primary Parts of Short-long Arm Suspension[J];Vehicle & Power Technology;2009-03
9 Luo Chuan1,Zhang Zhengyu1,2,Wang Dingxiang3(1.College of Information Engineering,Southwest University of Science & Technology,Mianyang 621010,China; 2.State Key Laboratory of Aerodynamics,Mianyang 621000,China; 3.Bijie Multi-Media & Network Co.,Ltd.,Mianyang 621000,China);Single Image Space Resection Method Based on Adaptive Search Domain Monte Carlo[J];Ordnance Industry Automation;2010-12
10 SHE Hao-ping1,YANG Shu-xing1,NI Hui2 (1.Key Laboratory of Dynamics and Control of Flight Vehicle,Ministry of Education,Beijing Institute of Technology, Beijing 100081,China;2.Science Research Institute of China-North Group Company,Beijing 100089,China);New Algorithms to Estimate Initial Roll Angle for In-flight Alignment of GPS/INS Guided Munitions[J];Acta Armamentarii;2011-10
China Proceedings of conference Full-text Database 10 Hits
1 Liu Yitong,Fu Mengyin,Gao Hongbin School of Information Science and Technology,Beijing Institute of Technology,Beijing 100081,P.R.China;A Modified Particle Swarm Optimization Algorithm[A];[C];2007
2 Li Shuguang School of information Engineering,Chang'an University,Xi'an 710049,P.R.of China;A Particle Swarm Optimal Algorithm for Multiple Path Toll Problems on Freeway Networks[A];[C];2007
3 Fan Yekun 1,Liang Xinrong 1,2 1.School of Information,Wuyi University,Jiangmen,529020,P.R.China 2.College of Automation,South China University of Technology,Guangzhou 510640,P.R.China;Particle Swarm Optimization Based PI Controller for Freeway Ramp Metering[A];[C];2008
4 Cong Liang,Hu Chengquan,Guo Zongpeng,Jiang Yu,Sha Lihua College of Computer Science and Technology,Jilin University,Changchun 130012,P.R.China;Improvement of Original Particle Swarm Optimization Algorithm Based on Simulated Annealing Algorithm[A];[C];2008
5 Hu Qian1,Zeng Da-zhi2,Xie Xiao-gang3School of Information and Electronics,Beijing Institute of Technology,Beijing,China 100081;Precision Analysis of Numerical Integration of Satellite Orbit[A];[C];2012
6 Zhang Janwei,Cao Min,Wang Xin,Bi Zhizhou(Yunnan Electric Power Research Institute,Kunming 650217,China);Design of Testing Data Analysis and Statistics System of Gateway Multifunction Watt-hour Meter Based on Data Mining[A];[C];2011
7 Chuanbo Ren Tiangtao Tian Shandong University of Technology;Dynamic analysis of non-linear suspension based on precise integration method[A];[C];2007
8 Li Yangbo,Huang Dahai College of water conservancy and environment,Three Georges University;Variable Precision Method in temperature fields simulation analysis of concrete dams based on ICCG[A];[C];2010
9 ZHANG Bo(Xi'an Aerospace Composite Materials Research Institute,Xi'an 710025,China);RESEARCH ON TURNING FORCE OF HIGH-SILICON GLASS FIBER COMPOSITE[A];[C];2008
10 ;利用正交多项式图像配准方法实现矢量图与遥感图像的快速叠合[A];[C];2006
【Secondary Citations】
Chinese Journal Full-text Database 10 Hits
1 CAO Liulin,LI Xiaoguang,WANG Jing(Institute of Automation, School of Information Science and Technology,Beijing University of Chemical Technology, Beijing 100029, China);Modeling of batch reactor based on structure approaching hybrid neural networks approach[J];Journal of Chemical Industry and Engineering(China);2008-04
2 JIANG Hua-gang,WU Geng-feng (Department of Computer Science,Shanghai University,Shanghai 200072);RBF Network Prediction Model Based on Artificial Immune Principal[J];Computer Engineering;2008-02
3 HE Yu-yao,ZHANG Hui-dang(College of Marine,Northwestern Polytechnical University,Xi’an 710072);Modeling and Prediction of Underwater Acoustic Signal Based on PSO and RBF Neural Network[J];Computer Engineering;2008-23
4 LI Su - jie,SHEN Dong - ri,CHEN Yi - jun.LI Yue - ying (Institute of Information, yaoning University of Petroleum & Chemical Technology, Fushun Liaoning 113001, China);An Iterative Optimal Predictive Control Based on Neural Network[J];Computer Simulation;2006-10
5 HUANG De-xian~1,JIN Yi-hui~1,ZHANG Jie~2,MORRIS Julian~2(1.Department of Automation,Tsinghua University,Beijing 100084,China;2.Department of Chemical Engineering and Process,University of Newcastle,Newcastle NE1 7RU,UK);Control and Optimization of EPI Reaction Ristillation Process Based on Wavelet Networks[J];Control Engineering of China;2005-04
6 LIU Heping, ZHANG Lanling and SUN Yikang (Department of Automation, Beijing University of Science and Technology·Beijing,100083,P.R.China);Predictive Control of Multivariable Nonlinear System Based on Multilayer Local Recurrent Neural Networks[J];Control Theory & Applications;2001-02
7 XU Xiangyuan (Department of Electrical Engineering, Guangdong University of Technology · Guangzhou,510090,P.R.China) MAO Zongyuan (Department of Automatic Control Engineering, South China University of Technology · Guangzhou, 510640,P.R.China);The Neura Network Predictive Control of Time-Delay Systems[J];Control Theory & Applications;2001-06
8 XIAO Ben-xian~1 WANG Xiao-wei~1 ZHU Zhi-guo~1 LIU Yi-fu~2 1.Institute of Industrial Automation,Hefei University of Technology,Hefei Anhui 230009,China; 2.Institute of Thermo Dynamic Automation,Anhui Electric Power Research Institute,Hefei Anhui 230022,China;Neural network predictive control for superheated steam temperature based on modified particle swarm optimization[J];Control Theory & Applications;2008-03
9 LI Shaoyuan; LIU Hao and YUAN Zhuzhi(Departmant of Computer and System Science, Nan Kai University. Tianjing, 300071 ,PRC);Generalized Predictive Control Based onError Correction Using Neural Network[J];CONTROL THEORY & APPLICATIONS;1996-05
10 Gu Yong, Su Hongye, Chu Jian (Zhejiang University);Recurrent Neural Network Modeling and Its Application in Nonlinear Predictive Control[J];CONTROL AND DECISION;2000-02
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