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《SEMICONDUCTOR TECHNOLOGY》 1998-06
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Development and Applications for Zinc Oxide Thin Film

Zhao Xiequn,Qiu Xiangdong (General Research Institute for Nonferrous Metals,Beijing 100088) Lin Hongyi (Electronic Engineering Department,Beijing University of Technologies,Beijing 100081)  
The development of the micro structural,electrical and optical properties of zinc oxide thin film is introduced.The preparation methods,such as magnetron sputtering,pulsed laser ablation,chemical vapor deposition,sol gel synthesis,and spray pyrolysis are described respectively.The application of the film and its industrialization prospect will be reviewed as well.
【CateGory Index】: TN304.055
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1 SHI Chao shu 1, 2 , ZHANG Guo bin 1, CHEN Yong hu 2, LIN Bi xia 2, SUN Yu ming 1, XU Peng shou 1, Fu Zhu xi 2, Kirm M 3, Zimmerer G 3 (1. The National Synchrotron Radiation Laboratory, Hefei*"230029, China; 2. Department of Physis, University of Science and Technology of China, Hefei*"230026, China; 3. Ⅱ. Institut für Experimentalphysik der Universitt Hamburg, Luruper Chaussee 149, D 22761 Hamberg, Germany);Special Spectroscopic Properties of ZnO Thin Film and Its Mechanisms[J];发光学报;2004-03
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3 SONG Ci,HANG Yin,XU Jun (Shanghai Institute of Optics and Fine Mechanics, Shanghai 201800,China);Research Progress of ZnO Single Crystal[J];人工晶体学报;2004-01
4 LIANG Hong-wei, LU You-ming, SHEN De-zhen, YAN Jian-feng, LIU Yi-chun, LI Bing-hui, ZHAO Dong-xu, ZHANG Ji-ying, FAN Xi-wu (Key Laboratory of Excited State Physics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130022, China);Study of Optical and Electrical Properties of ZnO Thin Films Grown by Plasma-enhanced Molecular Beam Epitaxy[J];人工晶体学报;2003-06
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1 XIE Ning-zhi;ZHU Wei;Special School for the Gifted Young,University of Science and Technology;Experimental Teaching Center,School of Physics,University of Science and Technology;;Effect of the substrate temperature and rapid annealing on the properties of AZO thin films prepared by RF magnetron sputtering[J];物理实验;2017-10
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7 Ma Hongfang;Ma Fang;Liu Zhibao;Wang Xiaorui;Sun Hua;Zhang Changcun;School of Materials Science and Engineering,Shandong Jianzhu University;Key Laboratory of Renewable Energy Utilization Technologies in Buildings,Ministry of Education;Shandong Chemical Industry Research Institute;;ORTHOGONAL OPTIMIZATION OF Al/Ga CO-DOPED ZnO TRANSPATENT CONDUCTING THIN FILM[J];太阳能学报;2015-07
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