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Theory and Method of Silicon Wafer Cleaning

Liu Chuanjun,Zhao Quan,Liu Chunxiang,Yang Hongxing (The 46th Institute(Electronics),Tianjin 300220)  
In this paper,the methods and mechanism of silicon wafer cleaning are presented.Some cases using silcon wafer cleaning are discussed.The importance and tendency of silicon wafer cleaning are also given briefly.
【CateGory Index】: TN305.2
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