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《Semiconductor Information》 2002-06
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Structural simulation and optimize of capacitive accelerometer

LIN Hai-feng,YANG Yong-jun,ZHENG Feng (Micro /Nano Technology Centre,HSRI ,Shijiazhuang050051,China)  
The principle of capacitive accelerometer with silicon beam is discussed in this paper.The finite element method(FEM)was applied to build three models with different silicon beam structures.Additionally,the first and second modal analysis with and without pre-stress,individual deflection caused by gravity of the three different beam structures were calculated out.Finally,we get the conclusion that double-beam structure is better than the other two different structures.The optimized parameters are benefited for the preparation of accelerometers and a better performance has got as the results.
【CateGory Index】: TP212.1
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【References】
Chinese Journal Full-text Database 2 Hits
1 LIU Yu 1,2 ,WEN Zhi Yu 1,ZHANG Liu Qiang 1,LIANG Yu Qian 1,WEN Zhong Quan 1,LI Xia 1 (1. College of Opto Electronic Engineering , Chongqing University, Chongqing 400044,China; 2. College of Automoble Engineering, Chongqing Institute of Technology, Chongqing 400044,China);Solution of the stiffness of 2-D capacitive silicon microaccelerometer[J];Micronanoelectronic Technology;2003-Z1
2 WANG Qingmin1,YANG Yaoen2,SU Mubiao1,LIU Yuhong11.Structural Health Monitoring and Control Institute,Shijiazhuang Railway Institute,Shijiazhuang 050043,China;2.Shijiazhuang Institute of Railway Engineering,Shijiazhuang 050041,China;Study on Sensing Characteristics of Micro Capacitive Sensor Based on MEMS[J];Chinese Journal of Sensors and Actuators;2009-10
【Citations】
Chinese Journal Full-text Database 1 Hits
1 Yin,Zhizhong; Hu Weilin; Guo Zengyuan (Department of Enginering mechanics, Tsinghua University);Characterization of Cantilever Microvalve[J];JOURNAL OF TRANSCLUCTION TECHNOLOGY;2000-01
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 ZHANG Wei,ZHANG Da-cheng,WANG Yang-Yuan (Institute of Microelectronics,Peking University,Beijing100871,China);Survey and development of MEMS[J];Semiconductor Information;2002-01
2 XIE Ming mei,QIU An ping,WANG Shou rong (Instrument Science and Engineering Department,Southeast University,Nanjing 210096,China);Effect of process stress on resonance frequency of the double linear vibratory gyroscope[J];Micronanoelectronic Technology;2003-Z1
3 YU Yi-ting,YUAN Wei-zheng,QIAO Da-yong(MEMS/NEMS Laboratory,Northwest Polytechnical University,Xian 710072,China);MEMS-based MIMU for acceleration measuring[J];Micronanoelectronic Technology;2004-01
4 L Zhijun NI Xuewen MO Bangxian XIANG Bin (Institute of Microelectronics, Peking University, Beijing, 100871);An Output Buffer Amplifier Used in Detection Circuit of Micro Sensor[J];Acta Scicentiarum Naturalum Universitis Pekinesis;2004-03
5 ZHANG Jiaqi,ZHOU Jingran,SUN Changlun,LIU Caixia (College of Electronic Science and Engineering,Jilin University ,Changchun 130012);Research on Two Dimensional Capacitive Acceleration Sensor[J];Journal of Changchun University of Science and Technology(Natural Science Edition);2009-01
6 LI Lin~, LI Jin-ming, ZHANG Wen-dong Dept.of Electronic Sci.&Tech., North China University of Science and Technology,Key lab of Instrumentation and Dynamic Measurement of Ministry of Education, Taiyuan 030051, China;Structure Simulation and Analysis for the Support System of Comb Micromechanical Gyros[J];Chinese Journal of Sensors and Actuators;2006-04
7 JIANG Qing-hua,YUAN Wei-zheng,CHANG Hong-long (Micro&Nano System Laboratory, Northwestern Polytechnical University,Xi`an 710072 ,China);An Interface Circuit for Capacitive Vibratory Microgyroscopes[J];Chinese Journal of Sensors and Actuators;2006-05
8 XU Ke-jie*,HE Peng-ju,ZHANG Bing(School of Mechatronic Engineering,Jiangxi University of science and technology,Ganzhou Jiangxi 341000,China);Circuit Design for MIMU Based on FPGA[J];Chinese Journal of Sensors and Actuators;2006-06
9 XIA Dun-zhu,ZHOU Bai-ling,WANG Shou-rong (School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China);Design and Testing Analysis of Double Closed Loop Vacuum Silicon Microgyroscope[J];Chinese Journal of Sensors and Actuators;2008-02
10 CHENG Long,WANG Shou-rong,YE Fu(School of Instrument Science and Engineering,Southeast University,Nanjing 210096,China);Research on Bias Temperature Compensation for Micromachined Vibratory Gyroscope[J];Chinese Journal of Sensors and Actuators;2008-03
China Proceedings of conference Full-text Database 3 Hits
1 Yin Yong, Wang Shourong(Department of Instrument Science and Engineering, Southeast University, Nanjing 210096,China);Frequency Response Test of a dual-mass Horizontal-axis Gyroscope[A];[C];2007
2 SHI Qin, WANG Shou-rong, ZHOU Bai-ling, QIU An-ping (Department of Instrument Science and Engineering, Southeast University, Nanjing 210096);Computer-Aided Design of Silicon Micromachined vibratory Gyroscope[A];[C];2003
3 Jiang Qinghua Yuan Weizheng Chang Honglong Wang Tao Northwestern Polytechnical University,Xi'an,710072;Study on Signal Detection Techniques for the Capacitive Micromachined Inertial Sensors[A];[C];2005
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 ZHANG Wei,ZHANG Da-cheng,WANG Yang-Yuan (Institute of Microelectronics,Peking University,Beijing100871,China);Survey and development of MEMS[J];Semiconductor Information;2002-01
2 LU Gui zhang,ZHAO Xin (Institute of Robotics and Information Automatic System,Nankai University,Tianjin 300071,China);Partlibrarybased method of MEMS design[J];Micronanoelectronic Technology;2003-Z1
3 LIU Zong lin, WU Xue zhong, LI Sheng yi (MEMS Research Center of N.U.D.T. , Changsha 410073,China);Design of comb-driving micro-silicon accelerometers based on structure parameters[J];Micronanoelectronic Technology;2003-Z1
4 LIU Yu 1,2 ,WEN Zhi Yu 1,ZHANG Liu Qiang 1,LIANG Yu Qian 1,WEN Zhong Quan 1,LI Xia 1 (1. College of Opto Electronic Engineering , Chongqing University, Chongqing 400044,China; 2. College of Automoble Engineering, Chongqing Institute of Technology, Chongqing 400044,China);Solution of the stiffness of 2-D capacitive silicon microaccelerometer[J];Micronanoelectronic Technology;2003-Z1
5 LAN Mu jie,LIU Xiao wei,CHEN Wei ping,LIU Ya chun,Wang Mei,WANG Dong wang (MEMS Center,Harbin Institute of Technology,Harbin,150001,China);Design and fabrication of signal processing integrated circuit for accelerometer[J];Micronanoelectronic Technology;2003-Z1
6 LIANG Chun guang,XU Yong qing and YANG Yong jun(The Electronic 13th Institute of Information Industry Ministry,Shijiazhuang 050051,China);Fabrication of MEMS Optical Switches[J];Chinese Journal of Semiconductors;2001-12
7 PENG Bo, WANG Lu, CHEN Xuedong (Electronic Engineering Research Institute of China Academy of Engineering Physics,Mianyang, Sichuan\ 621900 P.R.C.);The System Design Technology of Silicon Accelerometer[J];Journal of Transcluction Technology;2001-01
8 MENG Ming 1,2, GE Yun-jian 1, WU Zhong-cheng 1, GE Yu 1, QIAN Min 11. Institute of Intelligent Machine, Chinese Academy of Sciences, Hefei 230031, China2. Dept.of Automation, University of Science & Technology of China, Hefei 230026, China;Design and Stimulation for a Novel Elastic Body of Multi-Axis Accelerometer[J];Journal of Transcluction Technology;2003-04
9 WANG Bin,HUANG Xiao-dong,QIN Ming,HUANG Qing-an(Key laboratory of MEMS of Ministry of education, Nanjing 210096, China);Analysis and Improvement of an Interface Circuit of Capacitive Sensors[J];Chinese Journal of Sensors and Actuators;2008-02
10 SUN Hui-ming1,2,ZHANG Xiao-duo1,WU Jian1,QIN Ming1*,HUANG Qing-an11.Key Laboratory of MEMS of Ministry of Education,Nanjing 210096,China;2.HLJ Province Key Lab of Senior-Education for Electronic Engineering(HLJ University),Harbin 150080,China;Design and Fabrication of a Piezoresistive Humidity Sensor Based on MEMS Technology[J];Chinese Journal of Sensors and Actuators;2008-05
【Secondary References】
Chinese Journal Full-text Database 2 Hits
1 Xu Yi 1,2,Lu Jiali1,Hu Xiaoguo1,Ren Feng1(1College of Chemistry and Chemical Engineer,2Microsystem Center,Chongqing University,Chongqing 400030);Driving and Controlling Techniques of Microfluid in Microfluidic Analytical System[J];Chemistry;2007-12
2 LIU Yu, WEN Zhiyu YANG Hongyun ZHANG Liuqiang College of Opto-Electronic Engineering, Chongqing University, Chongqing 400044, China Automobile College, Chongqing Institute of Technology, Chongqing 400050, China;A NEW METHOD FOR CALCULATING THE MICROSTRUCTURE'S STIFFNESS IN AN ACCELEROMETER[J];Mechanics in Engineering;2006-04
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