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Beam test structure of MEMS for measuring fracture strength

MEI Nian-song,HUANG Qing-an (Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing210096,China)  
Fracture toughness of MEMS beams is one of the most important parameters under the critical conditions of MEMS devices and for database building of MEMS CAD software tools.The test of micro-scale fracture strength differs from macro-scale and fracture toughness is effected by many factors under micro-scale.This article outlines the measurement ways for fracture toughness in recently years.It is of reference value for further structure design.
【Fund】: 国家高技术研究发展计划(863计划)重大资助项目(2002A-1-1)
【CateGory Index】: TP212.6
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