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《Semiconductor Information》 2003-01
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Development of semiconductor device and research of solid nanoelectron device

ZHANG Kai-liang 1 ,LIU Yu-ling 1 ,WANG Fang 2(1.Institute of Microelectronic Technology&Materials,Hebei University of Technology,Tianjin300130,China;2.Department of Photoelectronics,Tianjin University of Technology,Tianjin300191,China)  
In this paper,the developing course of semiconductor electron device is simply retro-spected,which mainly includes the vacuum tube,solid transistor and nanoelectron device.And the materials,theories and manufacture techniques adopted by different semiconductor electron device are compared.On the base of which,the nanoelectronics and solid nanoelectron device are reviewed.The classification of nanometer device and solid nanoelectron devices including quantum dot and resonance tunnel device and single electron transistor are reviewed.Finally,the development and expectation are put forward.
【CateGory Index】: TN303
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