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《Micronanoelectronic Technology》 2003-03
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Kinematics analysis on a micro-nano-manipulator

JI Guo-jin, MA Kui, WANG Lei (China-German College of Tongji University, Shanghai 200092, China)  
Micro-nano-manipulator is an essential part in micro-nano-manipulation system. The forward and backward infinitesimal kinematics of a parallel micro-nano-manipulator are presented in this paper. The micro-nano-manipulability is analyzed through the Jacobian matrix. Its results merit to design the micro-nano-manipulator.
【CateGory Index】: TH703
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