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《Semiconductor Information》 2003-05
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Survey on micro-nano positioning /driving technologies

JI Guo-jin,MA Kui ,WANG Lei (China-German Colloge of Tongji University,Shanghai200092,China)  
Micro-nano positioning /driving technologies are the essential ones for micro-nano sciencetechnology,micro electric engineering and aeronauticaerospace etc.It is the premise for their industrialization.Some representative micro-nano positioning /driving technologies are surveyed in the paper,their theories and specific structures are analysed.Problems are defined and possible solutions are proposed.
【CateGory Index】: TH703
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