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《Micronanoelectronic Technology》 2003-Z1
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Applications of pulsed laser microfabrication technology in MEMS

LI Yan ning,TANG Jie,RAO Zhi jun,SONG Xiao hui, HU Xiao dong,FU Xing,HU Xiao tang (State Key Lab of Precision Measuring Technology & Instrument Tianjin,University,Tianjin 300072,China)  
The pulsed laser microfabrication technologies and their applications in MEMS manufacture are reviewed. The high energy pulsed lasers have 3 dimension microstructure fabrication capabilities with micro/sub micro precision, and are applicable to a wide range of materials. Therefore, compared with traditional microfabrication technologies, such as lithography, etching, bulk and surface silicon micromaching processes, pulsed laser microfabrication processes are quite unique.The pulsed laser direct fabrication of MEMS, laser LIGA processes, laser assisted etching and deposition processes, laser assisted micromanipulation and assembly technologies are discussed.
【Fund】: 国家高技术研究发展专项基金资助项目(2 0 0 2AA40 40 90 7);; 教育部留学回国人员科研启动基金项目
【CateGory Index】: TN249
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【Citations】
Chinese Journal Full-text Database 1 Hits
1 HAO Yilong 1 ZHANG Lixian 1,2 LI Ting 1 ZHANG Dacheng 1 (1.Institution of Microelectronics, Peking University, Beijing 100871, China) (2.LNM, Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080, China);TECHNOLOGY OF SILICON-BASED MEMS[J];Journal of Mechanical Strength;2001-04
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 YANG You-wen, WANG Jian-hua (Department of Science and Research, Hefei University of Technology, Hefei 230009, China);The status and application of MEMS technology[J];Micronanoelectronic Technology;2003-03
2 ;Overview About Recent Development Of MOEMS[J];Sensor World;2004-10
3 He Xiaolei Su Yan(Department of Instrument Science and Technology, Southeast University, Nanjing 210096, China);Fabrication of Z-axis micromachined gyroscope with DDSOG process[J];Journal of Southeast University (Natural Science Edition);2005-04
4 WANG Yang yuan,WU Guo ying,HAO Yi long,ZHANG Da cheng, XIAO Zhi xiong,LI Ting,ZHANG Guo bing,ZHANG Jin wen(Institute of Microelectronics,Peking University,Beijing 100871,China);Study of Silicon-Based MEMS Technology and Its Standard Process[J];Acta Electronica Sinica;2002-11
5 LI Yong, LI Yu_he, LI Qing_xiang,ZI Yan_yang(Department of Precision Instruments and Mechanology,Tsinghua University, Beijing 100084, China);Fabrication process analysis for electrostatically actuated microgripper based on silicon bulk micromachining[J];Optics and Precision Engineering;2003-02
6 SHI Qin,QIU An-ping,SU Yan,ZHU Xin-hua (School of Mechanical Engineering,Nanjing University of Science &Technology,Nanjing 210094,China);Mechanical coupling error of silicon microgyroscope[J];Optics and Precision Engineering;2008-05
7 Zheng Yanping1,Zhao Jiangming1,Liu Wufa1,Chen Xiaoyang2 (1School of Mechanical Engineering,Zhengzhou University,Zhengzhou 450001;2 School of Electromechanical Engineering and Automation,Shanghai University,Shanghai 200072);Modeling and Experiment of an Electrostatic Silicon Micro-resonators with Meander Suspension[J];Mechanical Science and Technology for Aerospace Engineering;2007-10
8 ZHANG WenMing MENG Guang Zhou JianBin (State Key Laboratory of Vibration, Shock and Noise, Shanghai Jiaotong University, Shanghai 200030, China);ELECTROSTATIC MICROMOTOR AND ITS RELIABILITY[J];Journal of Mechanical Strength;2005-01
9 ZHAO JiangMing~ 1,2 CHEN XiaoYang~1 WANG XiaoJing~1 (1.School of Electromechanical Engineering & Automation, Shanghai University, Shanghai 200072, China) (2.School of Mechanical Engineering, Zhengzhou University,Zhengzhou 450001,China);DESIGN AND MECHANICAL CHARACTER ANALYSE OF A NOVEL TYPE OF MICRO ELECTROSTATIC ACTUATOR WITH MULTI-FOLDED SUSPENSIONS[J];Journal of Mechanical Strength;2007-01
10 WANG HuYi YANG YuMing HU WenJun LI JianGuo(Institute of Systems Enginering,China Academy of Engineering Physics,Mianyang 621900,China);STRESS FIELD CAUSED BY A DISLOCATION IN DIAMOND-SI BIMATERIAL[J];Journal of Mechanical Strength;2013-04
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 Wang Kaiyuan; Tang Jieying(Dept. of Electronics Engineering, Shoutheast University, Nanjing 210018);Porous Silicon Light Emission Mechanism──Application of Nonometer Quantum Confinement Effect and Surface State in Light Emitting[J];SEMICONDUCTOR OPTOELECTRONICS;1994-04
2 ZHOU Hong a , LAI Jian-jun a,b , ZHAO Yue a , KE Cai-jun a,b , ZHANG Kun 2 , YI Xin-jian a,b (1.a.Department of Optoelectronic Engineering;b.The State Key Laboratory of Laser Technology, Huazhong University of Science and Technology, Wuhan 430074, China; 2.The 44th Electronic Research Institute, Chongqing 400060,China);Study on Reactive Ion Etching of Silicon in SF_6/O_2/CHF_3 Mixtures[J];Semiconductor Technology;2005-06
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4 LI Zhi-quan~(1*),ZHANG Ran~1,ZHANG Le-xin~2,YANG Hong-yan~1,ZHU Dan-dan~1,BAI Zhi-hua~11.Department of Instrument Science and Engineering,Qinhuangdao Hebei 066004,China;2.Sate Key Laboratory of Metastable Materials Science and Technology,College of Materials Science and Engineer,Yanshan University,Qinhuangdao Hebei 066004,China;Study on a Gas Sensor Based on the Optical Character of Porous Silicon Microcavities[J];Chinese Journal of Sensors and Actuators;2007-01
5 LIANG Ji-ran1,HU Ming1,KANG Yi-lan2,LEI Zhen-kun3,DOU Yan-wei1(1.Department of Electronic Science and Technology,School of Electronic Information Engineering,Tianjin University,Tianjin 300072,China;2.Department of Mechanics,School of Mechanical Engineering,Tianjin University,Tianjin 300072,China;3.Department of Engineering Mechanics,Dalian University of Technology,Dalin 116024,China);Study on residual in porous silicon[J];Transducer and Microsystem Technologies;2007-06
6 ZHANG Li ( Department of Civil Engineering, Yiwu College of Industry & Commerce, Yiwu 322000, China).;Microstructure and Microhardness of Laser Cladding Nickel Alloy-Matrix Composite Coating Reinforced with MicroNano Tungsten Carbide[J];Materials Protection;2006-12
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8 REN Peng1,SUN Lilai2,LIAO Jiaxin1,LI Junqiu1,WAN Xiaojun3,SHI Xianghua1,LIU Xiaobing1(1 Department of Physics and Electronic Science,Changsha University of Science and Technology,Changsha 410076;2 Department of Physics,Hunan University of Arts and Science,Changde 415000;3 Department of Computer Science and Technology,Hunan University of City,Yiyang 413000);Effects of Micro-Raman Spectra of Porous Silicon on Laser Powers[J];Materials Review;2007-05
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10 WU Yingna, LIANG Yong, FENG Zhongcao (Institute of Metal Research, The Chinese Academy of Sciences, Shenyang\ 110015, China);Surface modification of Al_2O_3SiC nanocomposites using excimer laser[J];MATERIALS SCIENCE AND ENGINEERING;2000-02
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