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《Micronanoelectronic Technology》 2003-Z1
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Applications of pulsed laser microfabrication technology in MEMS

LI Yan ning,TANG Jie,RAO Zhi jun,SONG Xiao hui, HU Xiao dong,FU Xing,HU Xiao tang (State Key Lab of Precision Measuring Technology & Instrument Tianjin,University,Tianjin 300072,China)  
The pulsed laser microfabrication technologies and their applications in MEMS manufacture are reviewed. The high energy pulsed lasers have 3 dimension microstructure fabrication capabilities with micro/sub micro precision, and are applicable to a wide range of materials. Therefore, compared with traditional microfabrication technologies, such as lithography, etching, bulk and surface silicon micromaching processes, pulsed laser microfabrication processes are quite unique.The pulsed laser direct fabrication of MEMS, laser LIGA processes, laser assisted etching and deposition processes, laser assisted micromanipulation and assembly technologies are discussed.
【Fund】: 国家高技术研究发展专项基金资助项目(2 0 0 2AA40 40 90 7);; 教育部留学回国人员科研启动基金项目
【CateGory Index】: TN249
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