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《Micronanoelectronic Technology》 2003-Z1
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Study on judging the initial contact point in nanoindentation

YANG Shu ming 1,ZHU Qiang 1,ZHAO Ze xiang 2,JIANG Zhuang de 1 (1. State Key Lab for Manufacturing Systems,Institute of Precision Engineering,Xi’an Jiaotong University,Xi’an710049,China; 2. Zhongyuan Institute of Technology,Zhengzhou450007,China)  
For nanoindentation, the contact point should be precisely determined in the loading process, because the precision of judging the initial contact point between indenter tip and the surface of sample may have much effect on the evaluating result of the mechanical properties for samples. Based on the structure of micro load displacement tester, developed in Institute of Precision Engineering, Xi'an Jiaotong University, some issues on judging initial contact point were investigated in details. Before the indenter tip touched the surface of the sample, the displacement value measured by a capacitive displacement sensor was the output of the loading mechanism without load. And when the indenter tip touched the surface of the sample, the trend of the displacement values measured by the sensor would depart from that of the displacement values of indenter having no load. Therefore, based on the change of the trend of voltage displacement curve, the intersection point between the fitting voltage displacement line of indenter having no load and the fitting voltage displacement polynomial curve of indenter having load may be judged as an initial contact point. Sufficient experiments show that the precision of the initial contact point may be within ±10nm used the method above.
【Fund】: 国家重点基础研究发展规划 (G19990 3 3 10 3 )
【CateGory Index】: TB302
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