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《Micronanoelectronic Technology》 2003-Z1
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Nanoindentation applying to mechanical measurement for MEMS

【Fund】: 国家自然科学基金资助项目 (10 2 42 0 0 1 10 172 0 86);; 中科院知识创新工程重要方向资助项目(KJCX2 SW L2)
【CateGory Index】: TP274.4
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【References】
Chinese Journal Full-text Database 2 Hits
1 ZHAO Lin-lin, XU Chen, HUO Wen-xiao, ZHAO Hui, YANG Dao-hong, SHEN Guang-di (College of Electronic Information & Control Engineering,Beijing University of Technology,Beijing Optoelectronic Technology Laboratory,Beijing 100022,China);Measurement and analysis on Young's modulus of silicon super thin free-handing diaphragm[J];Journal of Functional Materials and Devices;2005-03
2 Shen Haijun Shi Youjin(School of Aeronautics & Astronautics,Nanjing University of Aeronautics & Astronautics.Nanjing 210016);Testing technologies of nano experimental-mechanics[J];Modern Instruments;2006-05
【Citations】
Chinese Journal Full-text Database 2 Hits
1 Zhang Taihua Yang YeminState Key Laboratory of Nonlinear Mechanics (LNM), Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080, China;DEVELOPMENTS AND APPLICATIONS OF NANO-HARDNESS TECHNIQUES*[J];Advances In Mechanics;2002-03
2 Zhang Taihua Yang Yemin Zhao Yapu Bai YilongState Key Laboratory of Nonlinear Mechanics (LNM), Institute of Mechanics, Chinese Academy of Sciences,Beijing 100080, China;MEASUREMENT OF MECHANICAL PROPERTIES OF MEMS MATERIALS*[J];Advances In Mechanics;2002-04
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 Liu Meihua~1, Wang Jing~2, Wang Dongai~1 (1. School of Mechanical Engineering, Tianjin Commence University, Tianjin 300134, China; 2.Military Traffic Institute, Tianjin 300161, China);ANALYSIS OF TEST METHODS FOR INDENTATION HARDNESS[J];Engineering Plastics Application;2005-07
2 ZHANG Hai xia 1,ZHANG Tai Hua 2,HUAN Yong 2 (1.Institute of Microelectronics,Peking University,Beijing100871,China; 2. State Key Lab of Nonlinear Mechanics,Institute of Mechanics,Chinese Academy of Sciences,Beijing100080,China);Nanoindentation and nanoscratch measurements on the mechanical properties of SiO_2 film[J];Micronanoelectronic Technology;2003-Z1
3 CHEN Zhang1,SU Wei2,WAN Min1 (1.School of Mechanical Engineering and Automation,Beihang University,Beijing 100083,China; 2.Insititute of Electronic Engineering,China Academy of Engineering Physics,Mianyang 621900,China);Test Methods for MEMS Material Mechanical Properties[J];Micronanoelectronic Technology;2007-06
4 YU Yan~1;FEI Ben-hua~2;ZHANG Bo~2;WANG Ge~1.1 International Center for Bamboo and Rattan,Beijing,100102,P.R.China;2 Beijing Institute of Forestry Machinery,Chinese Academy of Forestry,100091, P.R.China.;Longitudinal MOE and hardness of different cell wall layers of softwood tracheids.[J];Journal of Beijing Forestry University;2006-05
5 DONG Shi-yun1, XU Bin-shi2, Beake B D3, Zhu Sheng2, HU Zhen-feng2, WANG Hong-mei1 ( 1. National key laboratory for remanufacturing,Beijing 100072; 2.Department of materials science & engineering, Academy of armored force engineering, Beijng 100072; 3. Micro materials ltd, Wrexham, LL13 7YP, UK );The Measurement of Youngs Modulus of the Electro-brush Plated Nano-Composite Coatings by Nano-indenter[J];China Surface Engineering;2003-04
6 ZHANG Tai-hua1,LIU Dong-xu1,HUAN Yong1,WANG Xiu-lan2 (1.State Key Laboratory of Nonlinear Mechanics (LNM), Institute of Mechanics, Chinese Academy of Sciences, Beijing, 100080;2. Beijing Research Institute of Aerospace Materials & Technology, Beijing, 100076);Effects of Different Substrates on Micromechanical and Tribology Properties of TiN Films[J];China Surface Engineering;2003-04
7 JIANG Hong-kui,HU Li-guang,ZHU Chun-geng,ZHONG Jun-jian (Zhejiang Normal University,Jinhua 321004,China);Testing Technology of Mechanical Properties of Micro/nanoscale Component[J];Surface Technology;2006-04
8 LIU Mei-hua 1 , WANG Dong-ai 1 , WANG Jiang2 (1.Tianjin Commerce University, Tianjin 300134, China; 2. Academy of Military Transportation, Tianjin 300161, China);Application of Micro-indentation Techniques in the Fiber Properties Study[J];Packaging Engineering;2005-04
9 GUAN Le~ 1,2* ,CHU Jin-kui~ 1,2 ,WANG Xiao-dong~ 1,2 ,ZHANG Duan-qin~ 1,2 ,WANG Li-ding~ 1,2 1.Key Laboratory for Dalian University of Technology Precision & Non-traditional Machining of Ministry of Education, Dalian 116023,china; 2.Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian 116023,china;System-Level Design Methodology and Application in Integrated Testing System[J];Chinese Journal of Sensors and Actuators;2006-05
10 HUANG Li-jun,HUANG Xu,CAO Chun-xiao(Beijing Institute of Aeronautical Materials,Beijing 100095,China);Nanoindentation Characteristics of Ti-12Mo-6Zr-2Fe Titanium Alloy[J];Journal of Materials Engineering;2007-03
China Proceedings of conference Full-text Database 3 Hits
1 ;A Review of Mechanical Properties Test Methods forMEMS Material[A];[C];2006
2 DING Jian-ning, XIE Guo-xin (Micro/Nano Science & Technology Center, Jiangsu University, Zhenjiang 212013, China);STUDY OF NANOINDENTION AND FRICTIONAL PROPERTIES ON PHASE CHANGE STORAGE MEDIA[A];[C];2006
3 Wu Yu-feng~1, Ma Sheng-ge~2, Zhou Yi~1, Zhang De-yuan~2, Zhang Yi-chen~1, Geng Man~2 (1. Northeastern University, Shenyang 110004,China; 2. National R&D center for surface engineering of China, Shenzhen,518029,China);Influence of technical parameter on TiN prepared by middle frequency unbalanced magnetron Sputtering[A];[C];2005
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 YANG Li-rong,JIN Zheng-guo,BU Shao-jing,CHENG Zhi-jie (Key Laboratory for Advanced Ceramics and Machining Technology of Ministry of Education, Materials School, Tianjin University, Tianjin 300072, China);Preparation and optical properties of ZnO thin films[J];Ordnance Material Science and Engineering;2004-01
2 LI Jing 1, WU Sun tao 1,ZHONG Can 1,2 (1.Pen Tung Sah MEMS Research Center, Xiamen University,Xiamen 361005,China; 2. Department of Physics,Xiamen University,Xiamen 361005,China);The growth of ZnO nano-film by RF magnetic sputtering[J];Micronanoelectronic Technology;2003-Z1
3 CHEN Zhang1,SU Wei2,WAN Min1 (1.School of Mechanical Engineering and Automation,Beihang University,Beijing 100083,China; 2.Insititute of Electronic Engineering,China Academy of Engineering Physics,Mianyang 621900,China);Test Methods for MEMS Material Mechanical Properties[J];Micronanoelectronic Technology;2007-06
4 Liu Baoheng Tao Hongchou;The Influence of the Difference of the Roll Diameter on the Cold Strip Rolling Process[J];;1983-03
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6 XUE Fei, MO Jian-hua, HUANG Shu-huai (State Key Lab of Plastic Forming and Die & Mould Tech,Huazhong University of Science and Technology,Wuhan 430074,China);Research on resin level control in stereolithography apparatus[J];Journal of Transducer Technology;2005-07
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8 HUANG Xiao xu 1, CAI Da yong 1, YAO Mei 1, LIU Qing 2, N. Hansen 2(1. College of Materials Science & Chemical Engineering, Yanshan University, Qinhuangdao 066004, China; 2. Materials Research Department, Ris National Laboratory, Denmark);Microstructure evolution in aluminum and copper deformed by cold rolling[J];Material Science and Technology;2000-03
9 SHEN Hai-jun, MU Xian-cai (School of aeronautics & astronautics, Nanjing University of aeronautics & astronautics, Nanjing 210016, China);FE Analyses of Tensile "Y"-shaped, Bamboo-shaped, and Straight Carbon Nanotubes[J];Journal of Materials Science and Engineering;2005-03
10 YANG Yin-ye~1, TANG Hong-min~2(1.Department of Physics, Guizhou University for Ethnic Minorities, Guiyang 550025, China;2.Department of Chemistry, Guizhou University for Ethnic Minorities, Guiyang 550025, China );Measurement of Chitosan Material Surface Charge Distribution Using Scanning Probe Microscope[J];Journal of Materials Science and Engineering;2005-05
【Secondary References】
Chinese Journal Full-text Database 2 Hits
1 LI Bo, XU Chen, ZHAO Hui, ZHAO Lin-lin, HUO Wen-xiao, SONG Yi-chao, SHEN Guang-di (College of Electronic Information and Control Engineering, Beijing University of Technology, Beijing Optoelectronic Technology Laboratory, Beijing 100022, China);Fabrication and Characterization of Free Standing Structure Membrane with High Width-Thickness Ratio[J];Chinese Journal of Sensors and Actuators;2006-05
2 LIU Gen-lin1,SHEN Hai-jun2(1. Department of Basic Science of Yancheng Institute of Technology,Yancheng 224051,China) (2.College of Aerospace Engineering,Nanjing University of Aeronautics &Astronautics,Nanjing 210016,China);Nanoart:One Kind of Art Combined Faultlessly with High-technology[J];Nanoscience & Technology;2009-04
【Secondary Citations】
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1 MEI Tao 1,2 KONG Deyi 2 ZHANG Peiqiang 1 WU Xiaoping 1 (1.Department of Mechanics and Mechanical Engineering, University of Science and Technology of China, Hefei 230027, China) (2.Institute of Intelligent Machines, Chinese Academy of Sci;MECHANICAL PROPERTIES AND SCALING EFFECTS IN MICRO-ELECTRO-MECHANICAL SYSTEMS[J];Journal of Mechanical Strength;2001-04
2 CHEN Longqing ZHAO Minghao ZHANG Tong Yi (Department of Mechanical Engineering, Hong Kong University of Science and Technology, Hong Kong, China);THE TESTING METHOD OF MECHANICAL PROPERTIES OF THIN FILMS[J];Journal of Mechanical Strength;2001-04
3 ZHANG Taihua 1 YANG Yemin 1 ZHAO Yapu 1 YU Tongxi 2 SUN Qingping 2 (1.State Key Laboratory of Nonlinear Mechanics (LNM), Institute of Mechanics,Chinese Academy of Sciences, Beijing 100080, China) (2.Department of Mechanical Engineering, Ho;RESEARCH ON TENSION MEASUREMENTS FOR MINISIZE MATERIALS[J];Journal of Mechanical Strength;2001-04
4 SUN Kehao 1,2 QIAN Jin 1 ZHANG Lixian 1 YU Tongxi 3 ZHAO Yapu 1 (1.IAA, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China) (2.State Key Laboratory of Nonlinear Mechanics, Institute of Mechanics, CAS, Beijing 100;COMPUTER-AIDED DESIGN AND SIMULATION FOR MEMS DEVICES[J];Journal of Mechanical Strength;2001-04
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9 ChihMing HoMechanical and Aerospace Engineering Department, University of California, Los Angles Los Angeles, California 90095 YuChong Tai Electrical Engineering Department, California Institute of Technology, Pasadena, California 91125;MICROELECTROMECHANICAL SYSTEMS (MEMS)AND FLUID FLOWS[J];ADVANCES IN MECHANICS;1998-02
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