Design and optimization of MEMS optical switch actuated by piezoelectric cantilever based on Si
FANG Hua jun,LIU Jian she,REN Tian ling,LIU Li tian (Institute of Microelectronics,Tsinghua University,Beijing 100084,China)
The mechanical performance of a novel optical switch actuated by PZT piezoelectric multiple layer cantilever is studied with piezoelectric multiple layer cantilever analysis model, in which the relationship between structure parameters and the mechanical performance and some factors that have an effect on the performance of this optical switch are discussed. A new fabrication process method of the optical switch actuated by piezoelectric multiple layer cantilever based on Si is presented. An optimal design of the optical switch operating at 25V is presented. The theory analysis result is compared with that from the finite element coupling field analysis.