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《Micronanoelectronic Technology》 2004-03
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Research of the capacitive force micro-sensor

LIU Jing-chun 1 ,DENG Yong-he 2 ,LI Yu-cong 2(1.Dept of Physics and Electronic Eng.Jishou University,Jishou416000,China;2.Dept of Mathematics and Physics,Hunan Institute of Engineering,Xiangtan411100,China)  
The specific structure capacitive force micro-sensor is introduced.The principle and survey circuit demonstrated are demonstrated and analyzed.
【CateGory Index】: TP212.1
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