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《Micronanoelectronic Technology》 2005-03
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Research and Application of Micro/Nano Tweezers: The Tool of Manipulating the Micro World

LIU Jing ( Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100080, China)  
Manipulating very small objects has been a big challenging task in many areas. As the most basic tool to manipulate, fabricate, characterize, assemble and test the micro/nano scale devices and biological samples, micromanipulation keeps receiving attentions over the area of micro/ nano technology especially micro automation. Research along this direction is becoming a major stream in the world. This paper summarized and reviewed the latest advancement in developing the micro/nano manipulation method. According to the working principles, classifications on the currently available micro/nano tweezers were made. Particularly, those enabled from using the mechanical, hydraulic, electrical, magnetic, acoustic, optical, thermal effects or their combinations were reviewed. Some of their typical applications in manipulating the micro/nano objects were introduced. It indicates that advancement of the micro/nano tweezer technologies will create more powerful tools in studying and implementing the micro world.
【Fund】: 国家自然科学基金项目资助(50325622;50176053)
【CateGory Index】: TH703
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【Co-citations】
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1 YANG Yang,LIU Jing (Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100080, China);Numerical Simulation on Operating Process of Freeze Tweezer for Manipulation of Micro/Nano Objects[J];Chinese Journal of Sensors and Actuators;2006-05
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