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《Micronanoelectronic Technology》 2005-12
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The Research and Prospect of Microactuator

CHEN Bing-ya1,2,LIU Ying1,HU Min1,LI Xiao-bing1,LI Yi-bing1,WANG Qiang1(1.School of Mechanical & Electrical Engineering,Nanchang University,Nanchang 330029,China;2.Depavtment of Test and Control Engineering,Nanchang Institute of Aeronautical Technology,Nanchang 330063,China)  
Microactuator is a kernel part of MEMS.The research and development of microactuators in recent years are reviewed.The actuating principles,actuating modes,application,and their advantages and disadvantages are outlined in order to optimize the design of actuators.Some individual opinions are put forward on the thermal actuators.
【Fund】: 国家自然科学基金资助项目(50275071)
【CateGory Index】: TH703
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