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《Micronanoelectronic Technology》 2006-01
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Study on Ablation of PMMA Based Biochip by Excimer Laser

QIAN Xiao-feng,CHEN Tao,GUO Shang-yong (College of Laser Engineering,Beijing University of Technology,Beijing 100022,China)  
Using excimer laser to manufacture polymer materials can get more ideal biochips. The reciprocal mechanism of excimer ablation and the PMMA material were studied by using the KrF excimer with wavelength of 248 nm. On the surface of PMMA,pores and microchannels were fabricated and the rules of technics parameters of excimer laser and machining quality were disscussed. The excimer laser ablation is suitable for fabrication of biochip and its process is simple.
【Fund】: 国家自然科学基金重点项目(50335050);; 北京市自然基金重点项目(3031001)
【CateGory Index】: TN492
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