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《Micronanoelectronic Technology》 2006-02
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Computation of Electrostatic Forces with Edge Effects for Micro-Structures

ZHAO Jian,WANG Hong-xi,JIA Jian-yuan (School of Electro-Mechanical Engineering,Xidian University,Xian 710071,China)  
With the principle of virtual displacement,the formulas of the electrostatic force are derived according to the theory of two dimensional parallel plate capacitor with edge effects. Based on the above work,we derived the formulas for the rectangle and circular capacitors and gained the precisions of different formulas by the comparison between the analytical solutions and the numerical ones.
【Fund】: 国家自然科学基金联合基金资助项目(10476019)
【CateGory Index】: O441.1
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