Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Micronanoelectronic Technology》 2006-04
Add to Favorite Get Latest Update

Textured ZnO Transparent Conductive Thin Film Prepared by Mid-Frequency Magnetron Sputtering

LIU Jia-yu1,2,YANG Rui-xia1,NIU Chen-liang1,XUE Jun-ming2,ZHAO Ying2,GENG Xin-hua21.School of Information Engineering,Hebei University of Technology,Tianjin 300130,China;2.Institute of Photo-Electronic Thin Film Devices and Technique of Nankai University,Key Laboratory of Photoelectronics Thin Film Devices and Technique of Tianjin,Key Laboratory of Optoelectronic Information Science and Technology,Chinese Ministry of Education,Tianjin 300071,China  
The smooth ZnO film with high conductivity and high transmission was obtained by mid-frequency magnetron sputtering.The resistivity of the film is 5.57×10-4 Ω·cm,the carrier concentration is 2.2×1020 cm-3 and the Hall mobility is 40.1 cm2/V·s.The avarage transmissivity is 85% within the visible range(400~800 nm).The textured ZnO was gained by post-deposition chemical etching.The influence of sputtering pressure and sputtering temperature on the structure of textured ZnO was analyzed.The textured ZnO for thin film solar cells was obtained.
【Fund】: 国家“973”重大基础研究项目资助(G2000028202 2000028203)
【CateGory Index】: TM24
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
【References】
Chinese Journal Full-text Database 4 Hits
1 TAN Tian-ya,JIANG Xue,CUI Chun-yang,LI Chun-mei,XU Guang-wen,WU Wei,GUO Yong-xin (Shenyang Key Laboratory of Photoelectronic Devices and Detection Technology,College of Physics,Liaoning University,Shenyang 110036,China);Progress of Deposition Techniques for ZnO-based Transparent Conductive Thin Films[J];Journal of Liaoning University(Natural Sciences Edition);2007-04
2 DING Yu,JIANG Bailing,TIAN Yaping,MA Eryun,ZHANG Xiaojing,CAO Zhirui,ZHAO Zhiming(Faculty of Materials Science and Engineering,Xi'an University of Technology,Xi'an 710048,China);Influence of Oxygen Flux on Optoelectronic Properties of AZO Films Deposited by Magnetron Sputtering Method[J];Journal of Xi'an University of Technology;2011-03
3 Lin Qinggeng1,2,Gao Xiaoyong1,*,Liu Yufen1,Lu Jingxiao1(1.The Key Lab of Materials Physics of Ministry of Education,Zhengzhou University,Zhengzhou 450052,China;2.School of Physics and Engineering,Zhengzhou University,Zhengzhou 450052,China);Growth of Al-Doped ZnO Films by Mid Frequency DC Magnetron Sputtering[J];Chinese Journal of Vacuum Science and Technology;2008-06
4 Lin Qinggeng1,2,Gao Xiaoyong1*,Liu Yufen1,Lu Jingxiao1(1.The Key Laboratory of Material Physics of Ministry of Education,Zhengzhou University,Zhengzhou 450052,China;2.School of Physics and Engineering,Zhengzhou University,Zhengzhou 450052,China);Surface Textures and Optical Properties of Al-Doped ZnO Films[J];Chinese Journal of Vacuum Science and Technology;2008-06
China Proceedings of conference Full-text Database 1 Hits
1 Lin Oinggeng,Gao Xiaoyong~*,Feng Hongliang,Chen Yongsheng,Yang Shie,Gu Jinghua, Lu Jingxiao (The Key Lab of Material Physics of Ministry of Education,Zhengzhou University,Zhengzhou 450052,China);STUDY ON THE PROPERTIES OF AL-DOPED ZINC OXIDE FILMS[A];[C];2008
【Citations】
Chinese Journal Full-text Database 1 Hits
1 Fu En'gang,Zhuang Daming,Zhang Gong,Fang Ling,Liang Zhanhong,Wu Minsheng (Department of Mechanical Engineering,Tsinghua University,Beijing,100084,China) Yang Weifang (Jin Zhou Group Corp.Zhejiang,313000,China);Effect of Substrate Temperature on Performance of ZAO Thin Films Deposited by Magnetron Sputtering[J];Vacuum Science and Technology;2003-01
【Co-citations】
Chinese Journal Full-text Database 5 Hits
1 Liu Jiayu,Zhu Kaiyu,Wang Wenyuan (School of Information Engineering,Hebei Polytechnic University,Tangshan 063000,China);Textured ZnO Transparent Conductive Thin Film Prepared by Chemical Etching[J];Micronanoelectronic Technology;2008-04
2 Yin Shengdong Ma Yong Yin Ling(School of Physics & Information Technology,Chongqing Normal University,Chongqing 400045,China);The Effect of Magnetron Sputtering Growth Parameters on Optical Properties of ZAO[J];Journal of Yunnan Nationalities University(Natural Sciences Edition);2006-02
3 Sun Ruonan*,Zhuang Daming,Zhang Gong(Department of Mechanical Engineering,Tsinghua University,Beijing100084,China);Growth and Properties of Y-Doped Zinc Oxide by Mid-Frequency Alternating Magnetron Sputtering[J];Chinese Journal of Vacuum Science and Technology;2007-05
4 Wang Tao1,Diao Xungang1*,Ding Peng1,Shu Yuanjie2,Wu Zhe3 1.School of Science,Beihang University,Beijing 100083,China;2.Institute of Chemical Materials,CAEP,Mianyang 621900,China;3.School of Aeronautic Science and Technology,Beihang University,Beijing 100083,China;Growth and Properties of Transparent Conductive ZnO∶Al Films by Magnetron Sputtering at Low Temperature[J];Chinese Journal of Vacuum Science and Technology;2007-06
5 Yang Weifang1,Liang Zhanhong2,Hou Yaqi2,Zhuang Daming2*,Zhang Gong2 (1.Kingland Corporation,Huzhou,Zhejiang 313000,China;2.Department of Mechanical Engineering,Tsinghua University,Beijing 100084,China);Properties of Zinc Aluminum Oxide Films and Its Ceramic Target Fabrication[J];Chinese Journal of Vacuum Science and Technology;2008-01
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 GUO Ai-yun, XUE Yi-yu, XIA Zhi-lin, ZHU Xuan-min, GE Chun-qiao {School of Material and Engineering, Wuhan University of Technology, Wuhan 430070, China);Electron Beam Evaporation Deposited ZAO Thin Films by Orthogonal Experiment[J];Semiconductor Technology;2005-07
2 LI Shi-ping,LI Ling (Physical Department of Jinan University,Guangzhou 510632, China );Optical and Electrical Characteristics of Al Doped Zinc Oxide Thin Films Prepared by Sol-Gel[J];Semiconductor Technology;2006-10
3 Zhu Shunming,Ye Jiandong,Gu Shulin ,Liu Songmin,Zheng Youdou,Zhang Rong,and Shi Yi(Key Laboratory of Photonic and Electronic Materials Science and Technology of Jiangsu,Department of Physics,Nanjing University,Nanjing 210093,China);MOCVD Growth and Properties of Ga-Doped ZnO Films[J];Chinese Journal of Semiconductors;2005-08
4 Chen Xinliang,Xue Junming,Sun Jian,Zhao Ying,and Geng Xinhua(Tianjin Key Laboratory of Photo-Electronic Thin Film Devices and Technology,Key Laboratory of Opto-Electronic Information Science and Technology of the Ministry of Education, Institute of Photo-Electronic Thin Film Devices and Technology, Nankai University,Tianjin 300071,China);Growth of Textured ZnO Thin Films and Their Front Electrodes for Application in Solar Cells[J];Chinese Journal of Semiconductors;2007-07
5 CHEN Yuan 1\ ZHANG Deheng 1\ MA Jin 2\ YANG Tianlin 3 (1. Department of Physics, Shangdong University, 250100;\ 2. Institute of Optoelectronic Materials and Devices,Shandong Unversity, 250100;\ 3. Zibo Inctitute, 255200);Study of Transparent Conducting ZnO∶Al Films Prepared on Different Organic Substrate[J];;1999-03
6 Wang Wenwen Diao Xungang Wang Zheng Wang Tianmin (School of Science, Beijing University of Aeronautics and Astronautics, Beijing 100083, China);Optical, electrical and infrared emissing properties of DC magnetron sputtered ZnO:Al thin films[J];Journal of Beijing University of Aeronautics and Astronautics;2005-02
7 GONG Yan-sheng,WANG Chuan-bin,SHEN Qiang,ZHANG Lian-meng (State Key Lab for Advanced Technology of Materials Combination, Wuhan University of Technology, Hubei Wuhan 430070, China);Progress in Functional Oxide Thin Films[J];China Surface Engineering;2004-04
8 LU Feng 1,2, XU Cheng-hai2, WEN Li-shi3, CAO Hong-tao3, PEI Zhi-liang3, SUN Chao3 (1.School of Traffic and Mechanical Engineering,Shenyang Architecture University,Shenyang 110168; 2. School of Mechanical Engineering & Automation, Northeastern University,Shenyang 110004;3.Institute of Metal Research, Chinese Academy of Sciences,Shenyang 110015,China).;Comparison of Performance of Transparent Conducting ZnO:Al(ZAO) Thin Films on Transparent Glass and Organic Plastic Substrates[J];Materials Protection;2005-07
9 WANG Lei (State Key Laboratory of Silicon Material,Zhejiang University,Hangzhou 310027,China);Advances in Research on Deposition Techniques for ZnO Thin Films[J];Materials Review;2002-09
10 WANG Hua (Department of Information Material Science and Engineering,Guilin University of Electronic Technology,Guilin 541004);Distinctive Functional Material——Transparent Conductive Oxide Thin Films[J];Materials Review;2005-11
【Secondary References】
Chinese Journal Full-text Database 10 Hits
1 Tang Yuping (JiangMen Environment science Institute,JiangMen 529000,China);The Treatments to the Pollutions in Solar Battery Production Factory[J];Guangdong Chemical Industry;2010-10
2 GUO Ping1,SUN Feng-mei1,ZHANG Yuan1,XIA Bing2(1.Nanjing College of Information Technology,Nanjing 210046,China; 2.Nanjing Forestry University,Nanjing 210037,China);Comparative Study on Anti-reflection Effect between Porous Silicon and Silicon Nanowires[J];Surface Technology;2012-05
3 CHU Qing-mei,LIU Xiang,ZHANG Peng-xiang,DAI Yong-nian (Institute of Vacuum Metallurgy and Materials,Kunming University of Science and Technology,Kunming Yunnan 650051,China);Texturization of Si(100) in alkaline fluoride solution[J];Chinese Journal of Power Sources;2012-09
4 CHU Qing-mei,LIU Xiang,ZHANG Peng-xiang,DAI Yong-nian(Institute of Vacuum Metallurgy and Materials,Kunming University of science and technology,Kunming 650051,China);Si(100) Etching in Alkaline Fluoride Solution[J];Journal of Materials Science and Engineering;2012-06
5 SHI Jun-dai,YANG Hui-dong,HUANG Bo,XU Bao-yu,YU Song(School of Information and Science Technology,Jinan University,Guangzhou 510632,P.R.China);Influence of Annealing Time on Transparent Conductive Al-doped ZnO(ZAO) Thin Films Fabricated by Direct Current(DC) Sputtering[J];Science Technology and Engineering;2011-06
6 ZHAO Zhi-ming,DING Yu,TIAN Ya-ping,ZHANG Xiao-jing,MA Er-yun,BAI Li-jing,JIANG Bai-ling (School of Materials Science and Engineering,Xi'an University of Technology,Xi'an 710048,China)(Received 23 September 2011,accepted 30 November 2011);Evolution Mechanisim of Microstructure of AZO Thin Films Prepared by Reactive Magnetron Sputtering[J];Journal of Synthetic Crystals;2012-01
7 Wang Zhian;Wang Junsheng;Han Dakai;Tong Honghui;Southwest Institute of Physics;;EFFECT OF SUBSTRATE TEMPERATURE ON STRUCTURAL AND PHOTOELECTRIC PROPERTIES OF AZO THIN FILMS[J];Acta Energiae Solaris Sinica;2013-02
8 LIU Chang-lin1, WANG Jian-hua1,2, XIONG Li-wei1,2, WENG Jun1, WANG Wen-jun1, LI Yuan1, CHEN Guan-hu1 (1. Key Laboratory of Plasma Chemistry and Advanced Material, Wuhan Institute of Technology, Wuhan 430073, China; 2. Institute of Plasma Physics, Chinese Academy of Science, Hefei 230031, China);RECENT PROGRESS ON PREPARATION AND P-TYPE DOPING OF ZnO FILMS[J];Vacuum and Cryogenics;2009-02
9 Jiang Lili,Xin Yanqing,Song Shumei,Yang Tianlin*,Li Yanhui,Han Shenghao(Department of Space Science and Applied Physics,Shandong University at Weihai,Weihai 264209,China);Rapid Annealing and Property Improvement of DC Magnetron Sputtered Al-Doped ZnO Films[J];Chinese Journal of Vacuum Science and Technology;2010-03
10 ZHOU Ji-cheng,LI Li(School of Physics Science and Technology,Central South University,Changsha 410083,China);Effects of sputtering pressure on electrical and optical properties of transparent conducting ZnO thin film[J];The Chinese Journal of Nonferrous Metals;2009-07
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved