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《Micronanoelectronic Technology》 2006-05
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Research on TiNi Shape Memory Alloy Film in MEMS

ZHANG Wen-yan1,2,JIANG Lei2,XI Zheng-ping1(1.Northwest Research Institute of Non-ferrous Metal,Xi'an 710016,China;2.Institute of Chemistry,Chinese Academy of Sciences,Beijing 100080,China)  
The resent-year research on the application of TiNi shape memory alloy(SMA)thin films in MEMS technology was discussed,mainly in the characteristics,application principle in MEMS,TiNi preparation etc.The key technology,prospect and problems existed in their applications were pointed out.
【CateGory Index】: TB383.2
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