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《Micronanoelectronic Technology》 2006-05
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MEMS-Based Wireless Measuring System for Accelerometer

MAO Yao-hui,YUAN Wei-zheng,YU Yi-ting(MEMS/NEMS Laboratory,Northwest Polytechnical University,Xi'an 710072,China)  
Based on the wireless communication technique and MEMS,the signal measuring of MEMS-based micro accelerometer and transmission by wireless were analyzed,and the wireless measuring system is developed.The system hardware testing principles and designing rules are discussed,and the software flow of system is given.Acceleration is tested with the wireless measuring system.The research result shows that the system can be used in wireless measurement of the weak acceleration with a reasonable accuracy and sensitivity.
【CateGory Index】: TH824.4
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