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《Micronanoelectronic Technology》 2007-03
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ITO Thin Films Prepared by the Sol-Gel Spin-Coating Method

CHEN Jian,ZHANG Jiang,GAO Shan-min,QU Rong-jun (School of Chemistry and Materials Science,Ludong University,Yantai 264025,China)  
Using InCl_3 and SnCl_4·5H_2O as raw materials,Indium tin oxide thin films were prepared by the sol-gel spin-coating process. The phase composition and morphology properties of ITO thin films were characterized by the techniques of X-ray diffraction(XRD)and scanning electron microscope(SEM). The influence of the heat treated temperature,time and spin speed for the films structure and morphologies were studied. The results show that the ITO thin films are composite by cubic phase nanoparticles. Along with the coating numbers increase,the face became smoothness. The films gradate from noncrystalline to crystalline along with the increase of heat treatment temperature and time.
【Fund】: 中国博士后基金项目(2003034330);; 山东省自然科学基金项目(Y2005f11);; 鲁东大学中青年自然科学基金项目(21000301)
【CateGory Index】: O484.4
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